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Self-separated PZT thick films with bulk-like piezoelectric and electromechanical properties

Published online by Cambridge University Press:  01 June 2011

Qing Su ,
Benpeng Zhu ,
Joon Hwan Lee ,
Zhenxing Bi ,
Kirk Shung ,
Qifa Zhou ,
Shinichi Takeuchi ,
Bae Ho Park ,
Quanxi Jia  and
Haiyan Wang
Qing Su
Affiliation:
Materials Science and Engineering Program, Texas A&M University, College Station, Texas 77843-3128
Benpeng Zhu
Affiliation:
Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California 90089-1111
Joon Hwan Lee
Affiliation:
Materials Science and Engineering Program, Texas A&M University, College Station, Texas 77843-3128
Zhenxing Bi
Affiliation:
Department of Electrical and Computer Engineering, Texas A&M University, College Station, Texas 77843-3128
Kirk Shung
Affiliation:
Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California 90089-1111
Qifa Zhou*
Affiliation:
Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California 90089-1111
Shinichi Takeuchi
Affiliation:
Medical Engineering Course, Graduate school of Engineering, Toin University of Yokohama, Yokohama 225-8501, Japan
Bae Ho Park
Affiliation:
Division of Quantum Phases & Devices, Department of Physics, Konkuk University, Seoul 143-701, South Korea
Quanxi Jia*
Affiliation:
Center for Integrated Nanotechnologies, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
Haiyan Wang*
Affiliation:
Materials Science and Engineering Program and Department of Electrical and Computer Engineering, Texas A&M University, College Station, Texas 77843-3128
*
a)Address all correspondence to these authors. e-mail: [email protected]
b)e-mail: [email protected]
c)e-mail: [email protected]
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Abstract

Self-separated Pb(Zr0.52Ti0.48)O3 (PZT) films were processed by a hydrothermal deposition and a rapid thermal separation method, followed by a sol–gel filling and sintering process. The films possess excellent piezoelectric and electromechanical properties close to those of bulk material. The maximum remnant polarization is over 30 μC/cm2 and the electromechanical coupling factor (kt) reaches as high as 0.52. The unique microstructure characteristics of the PZT films, such as their highly dense structure, columnar grains, well-connected grain boundaries, and well-dispersed nanopores, could all contribute to the enhanced piezoelectric and electromechanical properties.

Keywords

HydrothermalPiezoelectricFilm
Type
Articles
Information
Journal of Materials Research , Volume 26 , Issue 11 , 14 June 2011 , pp. 1431 - 1435
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1.Noheda, B., Gonzalo, J.A., Cross, L.E., Guo, R., Park, S.E., Cox, D.E., and Shirane, G.: Tetragonal-to-monoclinic phase transition in a ferroelectric perovskite: The structure of PbZr0.52Ti0.48O3. Phys. Rev. B 61, 8687 (2000).CrossRefGoogle Scholar
2.Wang, Z.J., Cao, Z.P., Otsuka, Y., Yoshikawa, N., Kokawa, H., and Taniguchi, S.: Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation. Appl. Phys. Lett. 92, 222905 (2008).CrossRefGoogle Scholar
3.Kang, G.Y., Bae, S.W., Park, H., and Kim, T.S.: Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O3 microcantilever using a direct patternable sol-gel method. Appl. Phys. Lett. 88, 042904 (2006).CrossRefGoogle Scholar
4.Foster, E.S., Pavlin, C.J., Lockwood, G.R., Ryan, L.K., Harasiewicz, K.A., Berube, L., and Rauth, A.M.: Principles and applications of ultrasound backscatter microscopy. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 40, 608 (1993).CrossRefGoogle Scholar
5.Polla, D.L. and Francis, L.F.: Ferroelectric thin films in microelectromechanical systems applications. MRS Bull. 21, 59 (1996).CrossRefGoogle Scholar
6.Bernardini, F., Fiorentini, V., and Vanderbilt, D.: Spontaneous polarization and piezoelectric constants of III-V nitrides. Phys. Rev. B 56, 10024 (1997).CrossRefGoogle Scholar
7.Abrar, A., Zhang, D., Su, B., Button, T.W., Kirk, K.J., and Cochran, S.: 1–3 connectivity piezoelectric ceramic–polymer composite transducers made with viscous polymer processing for high frequency ultrasound. Ultrasonics 42, 479 (2004).CrossRefGoogle ScholarPubMed
8.Ishikawa, M., Kurosawa, M.K., Endoh, A., and Takeuchi, S.: Lead zirconate titanate thick-film ultrasonic transducer for 1 to 20 MHz frequency bands fabricated by hydrothermal polycrystal growth. Jpn. J. Appl. Phys. 44, 4342 (2005).CrossRefGoogle Scholar
9.Zhou, Q.F., Shung, K.K., and Huang, Y.: Improvement electrical properties of sol–gel derived lead zirconate titanate thick films for ultrasonic transducer application. J. Mater. Sci. 42, 4480 (2007).CrossRefGoogle Scholar
10.Kanno, I., Fujii, S., Kamada, T., and Takayama, R.: Piezoelectric properties of c-axis oriented Pb(Zr, Ti)O3 thin films. Appl. Phys. Lett. 70, 1378 (1997).CrossRefGoogle Scholar
11.Horwitz, J.S., Grabowski, K.S., Chrisey, D.B., and Leuchtner, R.E.: In situ deposition of epitaxial PbZr xTi 1-xO 3 thin films by pulsed laser deposition. Appl. Phys. Lett. 59, 1565 (1991).CrossRefGoogle Scholar
12.Zhu, B.P., Zhou, Q.F., Shi, J., Shung, K.K., Irisawa, S., and Takeuchi, S.: Self-separated hydrothermal lead zirconate titanate thick films for high frequency transducer applications. Appl. Phys. Lett. 94, 102901 (2009).CrossRefGoogle ScholarPubMed
13.Cho, J., Anderson, M., Richards, R., Bahr, D., and Richards, C.: Optimization of electromechanical coupling for a thin-film PZT membrane: I. Modeling. J. Micromech. Microeng. 15, 1797 (2005).CrossRefGoogle Scholar
14.Cho, J., Anderson, M., Richards, R., Bahr, D., and Richards, C.: Optimization of electromechanical coupling for a thin-film PZT membrane: II. Experiment. J. Micromech. Microeng. 15, 1804 (2005).CrossRefGoogle Scholar
15.Granzow, T., Dorfler, U., Woike, T., Wohlecke, M., Pankrath, R., Imlau, M., and Kleemann, W.: Influence of pinning effects on the ferroelectric hysteresis in cerium-doped Sr0.61Ba0.39Nb2O6. Phys. Rev. B 63, 174101 (2001).CrossRefGoogle Scholar
16.IEEE Standard on Piezoelectricity: Std. 176-1987 (IEEE, New York, 1987).Google Scholar