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Role of oxygen in the growth of carbon nanotubes on metal alloy fibers by plasma-enhanced chemical vapor deposition

Published online by Cambridge University Press:  31 January 2011

Young Kyun Moon ,
Chang Goo Jung ,
Seok Joo Park ,
Tae Gyu Kim  and
Soo H. Kim
Young Kyun Moon
Affiliation:
Department of Nanosystem and Nanoprocess Engineering, Pusan National University, Miryang-si, Gyeongnam 627-706, Republic of Korea
Chang Goo Jung
Affiliation:
Department of Nanosystem and Nanoprocess Engineering, Pusan National University, Miryang-si, Gyeongnam 627-706, Republic of Korea
Seok Joo Park
Affiliation:
Clean Energy System Research Center, Korea Institute of Energy Research, Yuseong-gu, Daejeon 305-343, Republic of Korea
Tae Gyu Kim*
Affiliation:
Department of Nanosystem and Nanoprocess Engineering, Pusan National University, Miryang-si, Gyeongnam 627-706, Republic of Korea
Soo H. Kim
Affiliation:
Department of Nanosystem and Nanoprocess Engineering, Pusan National University, Miryang-si, Gyeongnam 627-706, Republic of Korea
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

A method allowing for the stable growth of carbon nanotubes (CNTs) on the surface of a fibrous metal mesh substrate (SUS304) was developed with the assistance of the microwave plasma-enhanced chemical vapor deposition process. The controlled addition of up to ∼13% of O2 to the CH4 plasma reacting gas flow was found to promote the growth of the CNTs by oxidizing the amorphous carbon and removing the active H2 radicals. However, excessive amounts of O2 (i.e., fraction of O2 > ∼13%) and H2 were found to play a negative role in the growth of the CNTs. The control of the density and length of the CNTs was also achieved by varying the H2 plasma reduction time and CH4 plasma reacting time, respectively. Longer H2 reduction pretreatment of the catalytic metal islands resulted in the formation of a less dense CNT forest with craters. When the growth time of the CNTs was increased to ∼20 min, their length was increased to ∼10 μm. However, when the growth time of the CNTs exceeded 20 min, their length was significantly decreased, indicating that the continuous presence of O2 in the CH4 plasma destroys the preformed CNTs due to the oxidation reaction.

Keywords

NanostructurePlasma-enhanced CVD (PECVD) (deposition)
Type
Articles
Information
Journal of Materials Research , Volume 24 , Issue 4 , April 2009 , pp. 1536 - 1542
Copyright
Copyright © Materials Research Society 2009

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References

1Nerushev, O.A., Sveningsson, M., Falk, L.K.L., and Rohmund, F.: Carbon nanotube films obtained by thermal chemical vapour deposition. J. Mater. Chem. 11, 1122 (2001).CrossRefGoogle Scholar
2Delzeit, L., Nguyen, C.V., Stevens, R.M., Han, J., and Meyyappan, M.: Growth of carbon nanotubes by thermal and plasma chemical vapour deposition processes and applications in microscopy. Nanotechnology 13, 280 (2002).CrossRefGoogle Scholar
3Ci, L., Manikoth, S.M., Li, X., Vajtai, R., and Ajayan, P.M.: Ultra-thick freestanding aligned carbon nanotube films. Adv. Mater. 19 (20), 3300 (2007).CrossRefGoogle Scholar
4Chen, Y., Wang, Z.L., Yin, J.S., Johnson, D.J., and Prince, R.H.: Well-aligned graphitic nanofibers synthesized by plasma-assisted chemical vapor deposition. Chem. Phys. Lett. 272, 178 (1997).CrossRefGoogle Scholar
5Merkulov, V.I., Lowndes, D.H., Wei, Y.Y., Eres, G., and Voelkl, E.: Patterned growth of individual and multiple vertically aligned carbon nanotubes. Appl. Phys. Lett. 76, 3555 (2000).CrossRefGoogle Scholar
6Ho, G.W., Wee, A.T.S., Lin, J., and Tjiu, W.C.: Synthesis of well-aligned multiwalled carbon nanotubes on Ni catalyst using radio frequency plasma-enhanced chemical vapor deposition. Thin Solid Films 388, 73 (2001).CrossRefGoogle Scholar
7Meyyappan, M., Delzeit, L., Cassell, A., and Hash, D.: Carbon nanotube growth by PECVD: A review. Plasma Sources Sci. Technol. 12, 205 (2003).CrossRefGoogle Scholar
8Andrews, R., Jacques, D., Rao, A.M., Rantell, T., Derbyshire, F., Chen, Y., Chen, J., and Haddon, R.C.: Nanotube composite carbon fibers. Appl. Phys. Lett. 75, 1329 (1999).CrossRefGoogle Scholar
9Ago, H., Ohshima, S., Uchida, K., and Yumura, M.: Gas-phase synthesis of single-wall carbon nanotubes from colloidal solution of metal nanoparticles. J. Phys. Chem. B 105, 10453 (2001).CrossRefGoogle Scholar
10Hata, K., Futaba, D.N., Mizuno, K., Namai, T., Yumura, M., and Iijima, S.: Water-assisted highly efficient synthesis of impurity-free single-walled carbon nanotubes. Science 306, 1362 (2004).CrossRefGoogle ScholarPubMed
11Kim, S.H. and Zachariah, M.R.: In-flight kinetic measurements of the aerosol growth of carbon nanotubes by electrical mobility classification. J. Phys. Chem. B 110, 4555 (2006).CrossRefGoogle ScholarPubMed