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Restructuring tungsten thin films into nanowires and hollow square cross-section microducts

Published online by Cambridge University Press:  03 March 2011

Prahalad M. Parthangal ,
Richard E. Cavicchi ,
Christopher B. Montgomery ,
Shirley Turner  and
Michael R. Zachariah
Prahalad M. Parthangal
Affiliation:
University of Maryland, College Park, Maryland 20742; and National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Richard E. Cavicchi
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Christopher B. Montgomery
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Shirley Turner
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Michael R. Zachariah*
Affiliation:
University of Maryland, College Park, Maryland 20742; and National Institute of Standards and Technology, Gaithersburg, Maryland 20899
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

We report on the growth of nanowires and unusual hollow microducts of tungsten oxide by thermal treatment of tungsten films in a radio frequency H2/Ar plasma at temperatures between 550 and 620 °C. Nanowires with diameters of 10–30 nm and lengths between 50 and 300 nm were formed directly from the tungsten film, while under certain specific operating conditions hollow microducts having edge lengths∼0.5 μm and lengths between 10 and 200 μm were observed. Presence of a reducing gas such as H2 was crucial in growing these nanostructures as were trace quantities of oxygen, which was necessary to form a volatile tungsten species. Preferential restructuring of the film surface into nanowires or microducts appeared to be influenced significantly by the rate of mass transfer of gas-phase species to the surface. Nanowires were also observed to grow on tungsten wires under similar conditions. A surface containing nanowires, annealed at 500 °C in air, exhibited the capability of sensing trace quantities of nitrous oxides (NOx).

Keywords

NanofiberSelf-assemblySensor
Type
Rapid Communications
Information
Journal of Materials Research , Volume 20 , Issue 11 , November 2005 , pp. 2889 - 2894
Copyright
Copyright © Materials Research Society 2005

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References

REFERENCES

1Xia, Y., Yang, P., Sun, Y., Wu, Y., Mayers, B., Gates, B., Yin, Y., Kim, F. and Yan, H.: One-dimensional nanostructures: Synthesis, characterization and applications. Adv. Mater. 15, 353 (2003).CrossRefGoogle Scholar
2Rao, C.N.R., Deepak, F.L., Gundiah, G. and Govindaraj, A.: Inorganic nanowires. Prog. Solid State Chem. 31, 5 (2003).CrossRefGoogle Scholar
3Iijima, S.: Helical microtubules of graphitic carbon. Nature 354, 56 (1991).CrossRefGoogle Scholar
4Haddon, Robert C., (ed.), Special Issue on Carbon Nanotubes. Acc. Chem. Res. 35, 997 (2002).CrossRefGoogle Scholar
5Pan, Z.W., Dai, Z.R. and Wang, Z.L.: Nanobelts of semiconducting oxides. Science 291, 1947 (2001).CrossRefGoogle ScholarPubMed
6Matsui, S. and Ochiai, Y.: Focused ion beam applications to solid state devices. Nanotechnology 7, 247 (1996).CrossRefGoogle Scholar
7Gates, B., Mayers, B., Cattle, B. and Xia, Y.: Novel nanostructures of functional oxides synthesized by thermal evaporation. Adv. Funct. Mater. 12, 219 (2002).3.0.CO;2-U>CrossRefGoogle Scholar
8Zhang, Y., Wang, N., Gao, S., He, R., Miao, S., Liu, J., Zhu, J. and Zhang, X.: A simple method to synthesize nanowires. Chem. Mater. 14, 3564 (2002).CrossRefGoogle Scholar
9Hulteen, J.C. and Martin, C.R.: A general template-based method for the preparation of nanomaterials. J. Mater. Chem. 7, 1075 (1997).CrossRefGoogle Scholar
10Mu, C., Yu, Y., Wang, R., Wu, K., Xu, D. and Guo, G.: Uniform metal nanotube arrays by multistep template replication and electrodeposition. Adv. Mater. 16, 1550 (2004).CrossRefGoogle Scholar
11Walter, E.C., Ng, K., Zach, M.P., Penner, R.M. and Favier, F.: Electronic devices from electrodeposited metal nanowires. Microelectron. Eng. 61–62, 555 (2002).CrossRefGoogle Scholar
12Tosatti, E. and Prestipino, S.: Weird gold nanowires. Science 289, 561 (2000).CrossRefGoogle ScholarPubMed
13Lee, Y.H., Choi, C.H., Jang, Y.T., Kim, E.K., Ju, B.K., Min, N.K. and Ahn, J.H.: Tungsten nanowires and their field electron-emission properties. Appl. Phys. Lett. 81, 745 (2002).CrossRefGoogle Scholar
14Gu, G., Zheng, B., Han, W.Q., Roth, S. and Liu, J.: Tungsten oxide nanowires on tungsten substrates. Nano Lett. 2, 849 (2002).CrossRefGoogle Scholar
15Zhou, J., Xu, N.S., Deng, S.Z., Chen, J., She, J.C. and Wang, Z.L.: Large area nanowire arrays of molybdenum and molybdenum oxides: Synthesis and field-emission properties. Adv. Mater. 15, 1835 (2003).CrossRefGoogle Scholar
16Liu, J., Zhao, Y. and Zhang, Z.: Low-temperature synthesis of large-scale arrays of aligned tungsten oxide nanorods. J. Phys.: Cond. Mater . 15, 453 (2003).Google Scholar
17Vaddiraju, S., Chandrasekaran, H. and Sunkara, M.: Vapor phase synthesis of tungsten nanowires. J. Am. Chem. Soc. 125, 10792 (2003).CrossRefGoogle ScholarPubMed
18Okuyama, F.: Crystalline tungsten grown by reducing vapor-deposited tungsten oxide. J. Cryst. Growth 38, 103 (1977).CrossRefGoogle Scholar
19Veblen, D. and Post, J.: A TEM study of fibrous cuprite (chalcotrichite): Microstructures and growth mechanisms. Am. Mineral. 68, 790 (1983).Google Scholar
20Sarin, V.K.: Morphological changes occurring during the reduction of WO3. J. Mater. Sci. 10, 593 (1975).CrossRefGoogle Scholar
21Hu, W.B., Zhu, Y.Q., Hsu, W.K., Chang, B.H., Terrones, M., Grobert, N., Terrones, H., Hare, J.P., Kroto, H.W. and Walton, D.R.M.: Generation of hollow crystalline tungsten oxide fibers. Appl. Phys. A 70, 231 (2000).CrossRefGoogle Scholar
22Li, Y., Bando, Y. and Goldberg, D.: Quasi-aligned single-crystalline W18O49 nanotubes and nanowires. Adv. Mater. 15, 1294 (2003).CrossRefGoogle Scholar
23Mayers, B. and Xia, Y.: Formation of tellurium nanotubes through concentration depletion at the surface of seeds. Adv. Mater. 14, 279 (2002).3.0.CO;2-2>CrossRefGoogle Scholar
24Solis, J.L., Hoel, A., Kish, L.B., Sauko, S., Lantto, V. and Granqvist, C.G.: Gas sensing properties of nanocrystalline WO3 films made by advanced reactive gas deposition. J. Am. Ceram. Soc. 84, 1504 (2001).CrossRefGoogle Scholar
25Suehle, J.S., Cavicchi, R.E., Gaitan, M. and Semancik, S.: Tin oxide gas sensor fabricated using CMOS microhotplates and in-situ processing. IEEE Electron Device Lett 14, 118 (1993).CrossRefGoogle Scholar
26Cavicchi, R.E., Semancik, S., DiMeo, F. Jr. and Taylor, C.J.: Use of microhotplates in the controlled growth and characterization of metal oxides for chemical sensing. J. Electroceram 9, 155 (2002).CrossRefGoogle Scholar