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Raman scattering characterization of (100) and (111) oriented diamond films grown in the same run by hot filament chemical vapor deposition

Published online by Cambridge University Press:  03 March 2011

G. Popovici ,
S. Khasawinah ,
T. Sung ,
M.A. Prelas ,
B.V. Spitsyn ,
S. Loyalka ,
R. Tompson ,
J. Chamberlaine  and
H. White
G. Popovici
Affiliation:
Nuclear Engineering Department, University of Missouri, Columbia, Missouri 65211
S. Khasawinah
Affiliation:
Nuclear Engineering Department, University of Missouri, Columbia, Missouri 65211
T. Sung
Affiliation:
Nuclear Engineering Department, University of Missouri, Columbia, Missouri 65211
M.A. Prelas
Affiliation:
Nuclear Engineering Department, University of Missouri, Columbia, Missouri 65211
B.V. Spitsyn
Affiliation:
Nuclear Engineering Department, University of Missouri, Columbia, Missouri 65211
S. Loyalka
Affiliation:
Particulate Systems Research Center, University of Missouri, Columbia, Missouri 65211
R. Tompson
Affiliation:
Particulate Systems Research Center, University of Missouri, Columbia, Missouri 65211
J. Chamberlaine
Affiliation:
Physics Department, University of Missouri, Columbia, Missouri 65211
H. White
Affiliation:
Physics Department, University of Missouri, Columbia, Missouri 65211
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Abstract

The crystalline quality of a diamond film with two different preferential orientations (100) and (111), obtained in the same run by hot filament chemical deposition, has been studied. The quality of the film determined by Raman spectroscopy measurements was found to be nearly the same for both orientations. The second order Raman spectrum for diamond film was observed by using an infrared excitation.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 11 , November 1994 , pp. 2839 - 2844
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1Kobashi, K., Nishimura, K., Miyata, K., Kumagai, K., and Nakaue, A., J. Mater. Res. 5, 2469 (1990).CrossRefGoogle Scholar
2Boudina, A.. Fitzer, E., and Wahl, G., Diamond Relat. Mater. 1, 248 (1992).CrossRefGoogle Scholar
3Yarbrough, W. A. and Messier, R., Science 247, 688 (1990).CrossRefGoogle Scholar
4Zhu, W., Stoner, B. R., Williams, B. E., and Glass, J., Proc. IEEE 79, 621 (1991).CrossRefGoogle Scholar
5Chow, L., Horner, A., Sakouri, H., Roughani, B., and Sundaram, S., J. Mater. Res. 7, 1606 (1992).CrossRefGoogle Scholar
6Spitsyn, B. V., Builov, L. L., and Deryaguin, B. V., J. Cryst. Growth 52, 219 (1981).CrossRefGoogle Scholar
7Badzian, A. R., Badzian, T., Wang, X. H., and Hartnett, T. M., in. New Diamond Science and Technology, edited by Messier, R., Glass, J. T., Butler, J. E., and Roy, R. (Mater. Res. Soc. Symp. Int. Proc. NDST2–C3, Pittsburgh, PA, 1991), pp. 549–556.Google Scholar
8Chu, C. J., D'Evelyn, M.P., Hauge, R. H., and Margrave, J. L., in. New Diamond Science and Technology, edited by Messier, R., Glass, IT., Butler, J. E., and Roy, R. (Mater. Res. Soc. Symp. Int. Proc. NDST2–C3, Pittsburgh, PA, 1991), pp. 307–312.Google Scholar
9Baik, Y-T., Eun, K-Y., and Badzian, A., Proc. 2nd Int. Conf. on the Applications of Diamond Films and Related Materials, edited by Yoshikawa, M., Murakawa, M., Tzeng, Y., and Yarbrough, W. A. (MYU, Tokyo, 1993), pp. 709–713.Google Scholar
10Wagner, J., Wild, C., Müller-Sebert, W., and Koidl, P., Appl. Phys. Lett. 61, 1284 (1992).CrossRefGoogle Scholar
11Bachman, P. K. and Weichert, D. U., Diamond Relat. Mater. 1, 422 (1992).CrossRefGoogle Scholar
12Nemanich, R. J., Glass, J. T., Lucovsky, G., and Shroder, R. E., J. Vac. Sci. Technol. A 6, 1783 (1988).CrossRefGoogle Scholar
13Buckley, R. G., Moustakas, T. D., Ye, L., and Varon, J., J. Appl. Phys. 66, 3595 (1989).CrossRefGoogle Scholar
14Knight, D. S. and White, W. B., J. Mater. Res. 4, 385 (1989).CrossRefGoogle Scholar
15Hass, K. C., Tamor, M. A., Anthony, T. R., and Banholzer, W. F., Phys. Rev. B 45, 7171 (1992).CrossRefGoogle Scholar
16Narayan, J., Srivasta, A. R., Peters, M., Yokota, S., and Ravi, K. V., Appl. Phys. Lett. 53, 1823 (1988).CrossRefGoogle Scholar
17Badzian, A. R., Badzian, T., Roy, R., Messier, R., and Spear, K. E., Mater. Res. Bull. XXIII, 531 (1988).CrossRefGoogle Scholar
18Green, M., Hyer, R. C., Sharma, S. C., Mishra, K. K., Black, T. D., Chourasia, A. R., and Chopra, D. R., in New Diamond Science and Technology, edited by Messier, R., Glass, J. T., Butler, J. E., and Roy, R. (Mater. Res. Soc. Symp. Int. Proc. NDST2–C3, Pittsburgh, PA, 1991), pp. 759–764.Google Scholar
19Zhu, W., Randall, C. A., Badzian, A. R., and Messier, R., J. Vac. Sci. Technol. A 7, 2315 (1989).CrossRefGoogle Scholar
20Bou, P. and Vandenbulcke, L., Diamond and Diamond-like Films, edited by Dismukes, J. P. (The Electrochemical Society Symp., Pennington, NJ, 1989), pp. 610–629.Google Scholar
21Shroder, R. E., Nemanich, R. J., and Glass, J. T., Phys. Rev. B 41, 3738 (1990).CrossRefGoogle Scholar
22Robins, L. H., Farabaugh, E. N., Feldman, A., and Cook, L. P., Phys. Rev. B 43, 9102 (1991).CrossRefGoogle Scholar
23Wagner, J., Wild, C., and Koidl, P., Appl. Phys. Lett. 59, 779 (1991).CrossRefGoogle Scholar
24Mermoux, M., Roy, F., Marcus, B., Abello, L., and Lucazeau, G., Diamond Relat. Mater. 1, 519 (1992).CrossRefGoogle Scholar
25Abello, L. and Lucazeau, G., Andre, B., and Priem, Th., Diamond Relat. Mater. 1, 512 (1992).CrossRefGoogle Scholar
26Robins, L. H., Farabaugh, E. N., and Feldman, A., Diamond Optics IV, SPIE 1534, 105 (1991).CrossRefGoogle Scholar
27Bergman, L., Stoner, B. R., Turner, K. F., Glass, J. T., and Nemanich, R., J. Appl. Phys. 73, 3951 (1993).CrossRefGoogle Scholar
28Namba, Y., Heidarpour, E., and Nakayama, M., J. Appl. Phys. 72, 1748 (1992).CrossRefGoogle Scholar
29McNamara, K.M., Gleason, K. K., Vestyck, D. J., and Butler, J. E., Diamond Relat. Mater. 1 (12), 1145–1155 (1992).CrossRefGoogle Scholar
30Wada, N. and Solin, S. A., Physica B 105, 353 (1981).CrossRefGoogle Scholar
31Wada, N., Garzi, P. J., and Solin, S. A., J. Non-Cryst. Solids 35/36, 543 (1980).CrossRefGoogle Scholar
32Demichelis, F., Pirri, C. F., and Tagliaferro, A., Diamond Relat. Mater. 1, 298 (1992).CrossRefGoogle Scholar
33Solin, S. A. and Ramdas, A. K., Phys. Rev. B 1, 1687 (1970).CrossRefGoogle Scholar