Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-26T22:18:22.062Z Has data issue: false hasContentIssue false
  • English
  • Français

Raman microprobe studies of laser induced damage in dielectric films

Published online by Cambridge University Press:  31 January 2011

P.L. White ,
G.J. Exarhos ,
M. Bowden ,
N.M. Dixon  and
D.J. Gardiner
P.L. White*
Affiliation:
Pacific Northwest Laboratory, P.O. Box 999, Richland, Washington 99352
G.J. Exarhos*
Affiliation:
Pacific Northwest Laboratory, P.O. Box 999, Richland, Washington 99352
M. Bowden
Affiliation:
Newcastle upon Tyne Polytechnic, Ellison Place, Newcastle upon Tyne, NEI 8ST, England
N.M. Dixon
Affiliation:
Newcastle upon Tyne Polytechnic, Ellison Place, Newcastle upon Tyne, NEI 8ST, England
D.J. Gardiner
Affiliation:
Newcastle upon Tyne Polytechnic, Ellison Place, Newcastle upon Tyne, NEI 8ST, England
*
a)Current Address, Rocketdyne Division, 6633 Canoga Ave., MS FA16, Canoga Park, California 91303.
b)Author to whom correspondence should be addressed.
Get access

Abstract

Raman microprobe studies of pulsed laser damaged TiO2 films deposited using three different methods are reported. Phase transformation and redeposition of coating materials were observed in selected regions of amorphous films deposited by ion beam sputtering and electron beam evaporation. Preferential removal of a specific phase or transformation to a second phase were observed in reactively sputtered films. Some damage sites exhibited regions of stress heterogeneity which can be explained in terms of the return electron stream model of plasma/target interaction and rapid quenching.

Type
Articles
Information
Journal of Materials Research , Volume 6 , Issue 1 , January 1991 , pp. 126 - 133
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1Exarhos, G. J. and White, P. L., SPIE 540, Southwest Conference on Optics (1985).Google Scholar
2She, C. Y., Thin Solid Films 154, 239 (1987).CrossRefGoogle Scholar
3Hsu, L. S. and She, C. Y., Opt. Lett. 10, 638 (1985).CrossRefGoogle Scholar
4Exarhos, G. J. and Friedrich, D. M., Microbeam Analysis 23, 147 (1987).Google Scholar
5Wiggins, T. A., Walker, T. W., and Guenther, A. H., Laser Induced Damage in Optical Materials: 1980, NBS Special Publication 620, 277 (1980).Google Scholar
6Exarhos, G. J. and Pawlewicz, W. T., Appl. Opt. 23, 1986 (1984).CrossRefGoogle Scholar
7Exarhos, G. J., J. Chem. Phys. 81, 5211 (1984).CrossRefGoogle Scholar
8Exarhos, G. J., J. Vac. Sci. Technol. A4, 2962 (1986).CrossRefGoogle Scholar
9Hsu, L. S., Rujkorakarn, R., Sites, J. R., and She, C. Y., J. Appl. Phys. 59, 3475 (1986).CrossRefGoogle Scholar
10Ohsaka, T., Yamaoka, S., and Shimomura, O., Solid State Commun. 30, 345 (1979).CrossRefGoogle Scholar
11Fauchet, P. M., Energy Beam—Solid Interactions and Phase Transformation, edited by Kurz, H., Olsen, G. L., and Poate, J. M. (Mater. Res. Soc, Pittsburgh, PA, 1986), p. 149.Google Scholar
12Fauchet, P. M., Scan. Elect. Micro.. II, 425 (1986).Google Scholar
13Campbell, I. H., Fauchet, P. M., and Adar, F., in Semiconductor-on-Insulator and Thin Film Transistor Technology, edited by Chiang, A., Geis, M. W., and Pfeiffer, L. (Mater. Res. Soc. Symp. Proc. 53, Pittsburgh, PA, 1986), p. 311.Google Scholar
14Gardiner, D. J., Bowden, M., and Graves, P. R., Philos. Trans. R. Soc. London, A 320, 195 (1986).Google Scholar
15Capwell, R. J., Spagnolo, K., and DeSesa, M. A., Appl. Spectrosc. 26, 537 (1972).CrossRefGoogle Scholar
16Exarhos, G. J., in Applied Materials Characterization, edited by Katz, W. and Williams, P. (Mater. Res. Soc. Symp. Proc. 48, Pitts-burgh, PA, 1985), p. 461.Google Scholar
17Fauchet, P. M., Campbell, I. H., and Adar, F., Appl. Phys. Lett. 47, 10, 479 (1985).CrossRefGoogle Scholar
18Exarhos, G. J. and White, P. L., Laser Induced Damage in Optical Materials: 1984, edited by Bennett, H. E., Guenther, A. H., Milam, D., and Newman, B. E., NBS Special Publication 727, 262 (1986).Google Scholar
19Lange, M. R., Mclver, J. K., and Guenther, A. H., Laser Induced Damage in Optical Materials: 1983, edited by Bennett, H. E., Guenther, A. H., Milam, D., and Newman, B. E., NBS Special Publication 688, 454 (1983).Google Scholar
20Hsu, L. S., Solanki, R., and Collins, G. J., Appl. Phys. Lett. 45, 1064 (1984).CrossRefGoogle Scholar
21Fersman, I. A. and Khazov, L. D., Sov. J. of Quant. Electr. 2, 4, 319 (1973).CrossRefGoogle Scholar
22Radlinski, A. P., Calka, A., and Luther-Davies, B., Phys. Rev. Lett. 57, 3081 (1986).CrossRefGoogle Scholar
23Liu, P. L., Yen, R., Bloembergen, N., and Hodgson, R. T., Appl. Phys. Lett. 34, 864 (1979).CrossRefGoogle Scholar
24Jaanimagi, P. A., Ebrahim, N. A., Burnett, N. H., and Joshi, C., Appl. Phys. Lett. 38, 10, 734 (1981).CrossRefGoogle Scholar