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Processing of highly oriented lithium tantalate films by chemical solution deposition

Published online by Cambridge University Press:  31 January 2011

Satomi Ono  and
Shin-ichi Hirano
Satomi Ono
Affiliation:
Nagoya Municipal Industrial Research Institute, Rokuban, Atsuta, Nagoya 456–0058, Japan
Shin-ichi Hirano
Affiliation:
Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464–8603, Japan
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Abstract

The synthesis of lithium tantalate films by a chemical solution deposition method was studied. A precursor solution was prepared by dissolving lithium ethoxide and tantalum pentaethoxide in ethanol. The addition of formic acid to this precursor solution was very effective in the preparation of homogeneous and transparent precursor films on substrates by spin coating. Lithium tantalate films crystallized on sapphire (001) substrates with a highly preferred orientation along the c axis with heat-treating at temperatures above 450 °C. The refractive index of the film prepared at 550 °C was 2.049, which is close to the value for single crystals of lithium tantalate (2.176).

Type
Articles
Information
Journal of Materials Research , Volume 17 , Issue 10 , October 2002 , pp. 2532 - 2539
Copyright
Copyright © Materials Research Society 2002

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