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Preparation and characterization of SiO2–B2O3–P2O5 particles and films generated by flame hydrolysis deposition for planar light-wave circuits

Published online by Cambridge University Press:  31 January 2011

Hyungsoo Shin ,
Ji- Hyun Yi ,
Jong-Gab Baek  and
Mansoo Choi
Hyungsoo Shin
Affiliation:
National Creative Research Initiative Center for Nano Particle Control, School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151–742, Korea
Ji- Hyun Yi
Affiliation:
National Creative Research Initiative Center for Nano Particle Control, School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151–742, Korea
Jong-Gab Baek
Affiliation:
National Creative Research Initiative Center for Nano Particle Control, School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151–742, Korea
Mansoo Choi*
Affiliation:
National Creative Research Initiative Center for Nano Particle Control, School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151–742, Korea
*
a) To whom correspondence should be addressed. e-mail: [email protected]
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Abstract

Boron-phosphosilicate glass particles were deposited on Si wafer by flame hydrolysis deposition under controlled conditions. A few ten nanometer sized and spherical glass particles were synthesized in an oxy-hydrogen flame. The wafer surface temperature of 500 °C proved sufficient to form the Si–O–B framework while a higher temperature (approximately 730 °C) was required to produce Si–O–P formation. Gaussian bands at 3242 cm−1 provided evidence that the dissolved B2O3 concentration increased with the substrate temperature. In as-deposited porous films, a certain quantity of crystalline B2O3 remained, which was completely transformed into the noncrystalline phase after post deposition annealings. Film density measurements indicated that the B2O3 content in the doped silica films would be substantially lower than that in the precursor mixture.

Type
Articles
Information
Journal of Materials Research , Volume 17 , Issue 2 , February 2002 , pp. 315 - 322
Copyright
Copyright © Materials Research Society 2002

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References

REFERENCES

1.Kawachi, M., Yasu, M., and Edahiro, T., Electron. Lett. 19, 583 (1983).CrossRefGoogle Scholar
2.Kawachi, M., Opt. Quant. Electron. 22, 391 (1990).CrossRefGoogle Scholar
3.Okamoto, K., Opt. Quant. Electron. 31, 107 (1999).CrossRefGoogle Scholar
4.Li, T., Optical Fiber Communications, (Academic Press, Inc., Orlando, FL), p. 5.Google Scholar
5.Edahiro, T., Kawachi, M., Sudo, S., and Tomaru, S., Jpn. J. Appl. Phys. 19, 2047 (1980).CrossRefGoogle Scholar
6.Talbot, L., Cheng, R.K., Schefer, R.W., and Willis, D.R., J. Fluid Mechanics 101, 737 (1990).CrossRefGoogle Scholar
7.Sun, C.J., Myers, W.M., Schmidt, K.M., and Sumida, S., IEEE Photon. Tech. Lett. 3, 238 (1991).CrossRefGoogle Scholar
8.Choi, C.G., Jeong, M.Y., Choy, T.G., and J. Mater Sci. 34, 6035 (1999).CrossRefGoogle Scholar
9.Cho, J. and Choi, M., J. Aerosol Science. 31, 1077 (2000).CrossRefGoogle Scholar
10.Windeler, R.S., Friedlander, S.K., and Lehtinen, K.E.J., Aerosol Sci. Tech. 27, 174 (1997).CrossRefGoogle Scholar
11.Lee, D. and Choi, M., J. Aerosol Science. 31, 1145 (2000).CrossRefGoogle Scholar
12.Mazurin, O.V., Streltsina, M.V., and Shvaiko-Shvaikovskaya, T.P., Handbook of Glass Data: Part A, Silica Glass and Binary Silicate Glasses, (Elsevier, Amsterdam, The Netherlands, 1983), p. 545.Google Scholar
13.Mazurin, O.V., Streltsina, M.V., and Shvaiko-Shvaikovskaya, T.P., Handbook of Glass Data: Part A, Silica Glass and Binary Silicate Glasses, (Elsevier, Amsterdam, The Netherlands, 1983), p. 593.Google Scholar
14.Tenney, A.S. and Wong, J., J. Chem. Phys. 56, 5516 (1972).CrossRefGoogle Scholar
15.Adamczyk, A., Handke, M., and Mozgawa, W., J. Mol. Struct. 511–512, 141 (1999).CrossRefGoogle Scholar
16.Stoch, L. and Środa, M., J. Mol. Struct. 511–512, 78 (1999).Google Scholar
17.Zhang, Y. and Wang, M., Mater. Sci. Eng. B 49, 205 (1997).CrossRefGoogle Scholar
18.Chakraborty, I.N. and Condrate, R.A. Snr, Phys. Chem. Glass. 26, 68 (1985).Google Scholar
19.Zhang, Y. and Wang, M., Mater. Sci. Eng. B 67, 99 (1999).CrossRefGoogle Scholar
20.Stuart, B., Modern IR (infrared) Spectroscopy, (John Wiley & Son Ltd., University of Greenwich, United Kingdom), p. 109.Google Scholar
21.Walrafen, G.E. and Samanta, S.R., J. Chem. Phys. 69, 493 (1978).CrossRefGoogle Scholar
22.Davis, K.M. and Tomozawa, M., Solids 201, 177 (1996).Google Scholar
23.Plotnichenko, V.G., Sokolov, V.O., and Dianov, E.M., J. NonCryst. Solids, 261, 186 (2000).CrossRefGoogle Scholar
24. PeakFit™ 4.0, SPSS Inc., 1997.Google Scholar
25.Stuart, B., Modern IR (infrared) Spectroscopy, (John Wiley & Son Ltd., University of Greenwich, United Kingdom), p. 76.Google Scholar
26.Mazurin, O.V., Streltsina, M.V., and Shvaiko-Shvaikovskaya, T.P., Handbook of Glass Data: Part A, Silica Glass and Binary Silicate Glasses, (Elsevier, Amsterdam, The Netherlands, 1983), p. 563.Google Scholar