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Preparation and Characterization of Pb(Zr0.52Ti0.48)O3 Powders and Thin Films by a Sol-gel Route

Published online by Cambridge University Press:  31 January 2011

Dage Liu ,
Hongxi Zhang ,
Zhong Wang  and
Liancheng Zhao
Dage Liu*
Affiliation:
School of Materials Science and Engineering, Harbin Institute of Technology, P.O. Box 433, Harbin 150001, People's Republic of China, and Institute of Chemistry, Chinese Academy of Sciences, P.O. Box 2709, Beijing 100080, People's Republic of China
Hongxi Zhang
Affiliation:
School of Science, Harbin Institute of Technology, P.O. Box 408, Harbin 150001, People's Republic of China
Zhong Wang
Affiliation:
School of Materials Science and Engineering, Harbin Institute of Technology, P.O. Box 433, Harbin 150001, People's Republic of China
Liancheng Zhao
Affiliation:
School of Materials Science and Engineering, Harbin Institute of Technology, P.O. Box 433, Harbin 150001, People's Republic of China
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Lead zirconate titanate [Pb(ZrxTi1−x)O3 (PZT)] powders and ferroelectric thin films with a composition near the morphotropic phase boundary [Pb(Zr0.52Ti0.48)O3] were prepared by a modified sol-gel process using zirconium oxynitrate-2-hydrate as the zirconium source and ethylene glycol as solvent. The precursor solution was prepared from lead acetate-3-hydrate, tetrabutyl titanate, and zirconium oxynitrate-2-hydrate. Perovskite PZT powders were obtained after sintering at 450 °C for 2 h. Films rapid-thermally annealed at 650 °C for 1 min formed well-crystallized perovskite.Microstructures of these films indicated the presence of nano-sized grains (∼50 nm). The remnant polarization was 28.5 μC/cm2, and the coercive field was 39.8 kV/cm. Ferroelectric polarization fatigue test of In/PZT/Pt/Ti/SiO2/Si showed a high fatigue resistance up to 3 × 1010 cycles before Pr decreased by 50%.

Type
Articles
Information
Journal of Materials Research , Volume 15 , Issue 6 , June 2000 , pp. 1336 - 1341
Copyright
Copyright © Materials Research Society 2000

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