Hostname: page-component-586b7cd67f-t7czq Total loading time: 0 Render date: 2024-11-26T17:07:46.098Z Has data issue: false hasContentIssue false
  • English
  • Français

Position-selective growth of carbon nanotubes on Ni catalysts/Mo underlayers by thermal chemical vapor deposition

Published online by Cambridge University Press:  03 March 2011

Hiroki Okuyama ,
Nobuyuki Iwata  and
Hiroshi Yamamoto
Hiroki Okuyama*
Affiliation:
College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan
Nobuyuki Iwata
Affiliation:
College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan
Hiroshi Yamamoto
Affiliation:
College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan
*
a) Address all correspondence to this author. e-mail: [email protected]
Get access

Abstract

Position-selective growth of carbon nanotubes (CNTs) and vertically aligned CNTs (VACNTs) on patterned metal were prepared using thermal chemical vapor deposition (TCVD) and direct current (DC) plasma-enhanced chemical vapor deposition. We propose a new position-controlling method of CNTs by controlling not only the position of Ni as a catalyst, but also the morphology of Mo as an underlayer for the catalysts. Selective growth of CNTs was achieved at the edges of the patterned metal using TCVD. The minimum width of selectively grown CNTs, approximately 2.6 μm, was approximately one-eightieth that of the patterned metal, 200 μm. The VACNTs were synthesized using the PECVD method, but the VACNTs grew throughout the patterned metal. A position-controlled method of CNT growth was demonstrated in optimum conditions of the TCVD.

Keywords

Chemical vapor deposition (CVD)NanoscaleSputtering
Type
Articles
Information
Journal of Materials Research , Volume 21 , Issue 11 , November 2006 , pp. 2888 - 2893
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Kong, J., Yenilmez, E., Tombler, T.W., Kim, W., Dai, H., Laughlin, R.B., Liu, L., Jayanthi, C.S., Wu, S.Y.: Quantum interference and ballistic transmission in nanotube electron waveguides. Phys. Rev. Lett. 87, 106801 (2001).CrossRefGoogle ScholarPubMed
2.Yao, Z., Kane, C.L., Dekker, C.: High-field electrical transport in single-wall carbon nanotubes. Phys. Rev. Lett. 84, 2941 (2000).CrossRefGoogle ScholarPubMed
3.Wong, E.W., Sheehan, P.E., Lieber, C.M.: Nanobeam mechanics: Elasticity, strength, and toughness of nanorods and nanotubes. Science 277, 1971 (1997).CrossRefGoogle Scholar
4.Hafner, J.H., Cheung, C.L., Lieber, C.M.: Growth of nanotubes for probe microscopy tips. Nature 398, 761 (1999).Google Scholar
5.Stevens, R., Nguyen, C., Cassell, A., Delzeit, L., Meyyappan, M., Han, J.: Improved fabrication approach for carbon nanotube probe devices. Appl. Phys. Lett. 77, 3453 (2000).Google Scholar
6.Arie, T., Nishijima, H., Akita, S., Nakayama, Y.: Carbon-nanotube probe equipped magnetic force microscope. J. Vac. Sci. Technol., B 18, 104 (2000).CrossRefGoogle Scholar
7.Fan, S., Chapline, M.G., Franklin, N.R., Tombler, T.W., Cassell, A.M., Dai, H.: Self-oriented regular arrays of carbon nanotubes and their field-emission properties. Science 283, 512 (1999).Google Scholar
8.Saurakhiya, N., Zhu, Y.W., Cheong, F.C., Ong, C.K., Wee, A.T.S., Lin, J.Y., Sow, C.H.: Pulsed laser deposition-assisted patterning of aligned carbon nanotubes modified by focused laser beam for efficient field emission. Carbon 43, 2128 (2005).CrossRefGoogle Scholar
9.Milne, W.I., Teo, K.B.K., Amaratunga, G.A.J., Lacerda, R., Legagneux, P., Pirio, G., Semet, V., Binh, V.T.: Aligned carbon nanotubes/fibers for applications in vacuum microwave devices. Curr. Appl. Phys. 4, 513 (2004).Google Scholar
10.Dupuis, A.C.: The catalyst in the CCVD of carbon nanotubes— a review. Prog. Mater. Sci. 50, 929 (2005).Google Scholar
11.Merkulov, V.I., Melechko, A.V., Guillorn, M.A., Lowndes, D.H., Simpson, M.L.: Alignment mechanism of carbon nanofibers produced by plasma-enhanced chemical-vapor deposition. Appl. Phys. Lett. 79, 2970 (2001).CrossRefGoogle Scholar
12.Delzeit, L., Chen, B., Cassell, A., Stevens, R., Nguyen, C., Meyyappan, M.: Multilayered metal catalysts for controlling the density of single-walled carbon nanotube growth. Chem. Phys. Lett. 348, 368 (2001).CrossRefGoogle Scholar