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Plastic response of the native oxide on Cr and Al thin films from in situ conductive nanoindentation

Published online by Cambridge University Press:  05 January 2012

Douglas D. Stauffer ,
Ryan C. Major ,
David Vodnick ,
John H. Thomas III ,
Jeff Parker ,
Mike Manno ,
Chris Leighton  and
William W. Gerberich
Douglas D. Stauffer*
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
Ryan C. Major
Affiliation:
Hysitron, Inc., Minneapolis, Minnesota 55344
David Vodnick
Affiliation:
Hysitron, Inc., Minneapolis, Minnesota 55344
John H. Thomas III
Affiliation:
Characterization Facility, University of Minnesota, Minneapolis, Minnesota 55455
Jeff Parker
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
Mike Manno
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
Chris Leighton
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
William W. Gerberich
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Thin native oxide layers can dominate the mechanical properties of metallic thin films. However, to date there has been little quantification of how such overlayers affect yield and fracture during indentation in constrained film systems. To gain insight into such processes, electrical contact resistance was measured in situ during nanoindentation on constrained thin films of epitaxial Cr and polycrystalline Al, both possessing a native oxide overlayer. Measurements during loading of the films show both increases and decreases in current, which can then be used to distinguish between various sources of plasticity. Ex situ measurements of the oxide thickness are used to provide a starting point for elasticity simulations of stress in both systems. The results show that dislocation nucleation in the metal film can be differentiated from oxide fracture during indentation.

Keywords

NanoindentationElectrical propertiesMetallic conductor
Type
Articles
Information
Journal of Materials Research , Volume 27 , Issue 4 , 28 February 2012 , pp. 685 - 693
Copyright
Copyright © Materials Research Society 2012

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