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Piezoelectric and dielectric reliability of lead zirconate titanate thin films

Published online by Cambridge University Press:  31 January 2011

Ronald G. Polcawich  and
Susan Trolier-McKinstry
Ronald G. Polcawich
Affiliation:
The Pennsylvania State University, Materials Research Laboratory, University Park, Pennsylvania 16802
Susan Trolier-McKinstry
Affiliation:
The Pennsylvania State University, Materials Research Laboratory, University Park, Pennsylvania 16802
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Abstract

This work was directed toward developing a database for the long-term reliability of the transverse piezoelectric coefficient d31 under both unipolar and bipolar drive. Under unipolar drive, the films showed excellent reliability, with 99% of the devices surviving to 109 cycles. However, both aging and low amplitude bipolar drive resulted in rapid degradation of d31 due to backswitching of the ferroelectric domains. Both thermal and ultraviolet (UV) imprint prevented backswitching and resulted in improved aging and bipolar degradation behavior. Additionally, the UV imprinted samples showed nonlinear aging due to the presence of an internal space charge field that developed from photo-induced charge carriers.

Type
Articles
Information
Journal of Materials Research , Volume 15 , Issue 11 , November 2000 , pp. 2505 - 2513
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

1.Polla, D.L. and Francis, L.F., MRS Bull. 21(7), 59 (1996).CrossRefGoogle Scholar
2.Tamagawa, T., Polla, D.L., and Hsueh, C.C., Proc. IEDM, San Francisco, CA, Technical Digest, (IEEE, Piscataway, NJ, 1990), p. 617.Google Scholar
3.Kholkin, A.L., Tagantsev, A.K., Colla, E.L., Taylor, D.V., and Setter, N., Integ. Ferroelectr. 15, 317 (1997).CrossRefGoogle Scholar
4.Kholkin, A.L., Colla, E.L., Tagantsev, A.K., and Taylor, D.V., Appl. Phys. Lett. 68, 2577 (1996).CrossRefGoogle Scholar
5.Shepard, J.F., “The Investigation of Biaxial Stress Effects and the Transverse Piezoelectric (d31) Characterization of Lead Zirconate Titanate Thin Films,” Ph.D. Thesis, The Pennsylvania State University, University Park, PA (1998).Google Scholar
6.Shepard, J.F., Chu, F., Kanno, I., and Trolier-McKinstry, S., J. Appl. Phys. 85, 6711 (1999).Google Scholar
7.Shepard, J.F., Moses, P.J., and Trolier-McKinstry, S., Sens. Actuators, A71, 133 (1998).CrossRefGoogle Scholar
8.Lee, J., Ramesh, R., and Keramidas, V.G., Appl. Phys. Lett. 66, 1337 (1995).Google Scholar
9.Pike, G.E., Warren, W.L., Dimos, D., Tuttle, B.A., Ramesh, R., Lee, J., Keramidas, V.G., and Evans, J.T. Jr, Appl. Phys. Lett. 66, 484 (1995).CrossRefGoogle Scholar
10.Dimos, D., Warren, W.L., Sinclair, M.B., Tuttle, B.A., and Schwartz, R.W., J. Appl. Phys. 76, 4305 (1994).CrossRefGoogle Scholar
11.Warren, W.L., Dimos, D., Pike, G.E., Vanheusden, K., and Ramesh, R., Appl. Phys. Lett. 67, 1689 (1995).CrossRefGoogle Scholar
12.Budd, K.D., Dey, S.K., and Payne, D.A., Brit. Cer. Proc. 36, 107 (1985).Google Scholar
13.Tuchiya, T., Itoh, T., Sasaki, G., and Suga, T., J. Ceram. Soc. Japan 104, 159 (1996).CrossRefGoogle Scholar
14.Arlt, G. and Robels, U., Integ. Ferroelectr. 3, 343 (1993).CrossRefGoogle Scholar
15.Wang, D., Fotinich, Y., and Carman, G.P., J. Appl. Phys. 83, 5342 (1998).Google Scholar
16.Kholkin, A., Ferroelectrics 221, 219 (1999).CrossRefGoogle Scholar
17.Damjanovic, D., J. Appl. Phys. 82, 1788 (1997).CrossRefGoogle Scholar
18.Jaffe, B., Cook, W.R., and Jaffe, H., Piezoelectric Ceramics (Academic Press, reprinted by R.A.N., Manetta, OH, 1971).Google Scholar
19.Kohli, M., Muralt, P., and Setter, N., Appl. Phys. Lett. 72, 3217 (1998).CrossRefGoogle Scholar
20.Zhang, X.L., Chen, Z.X., Cross, L.E., and Schulze, W.A., J. Mater. Sci. 18, 968 (1983).CrossRefGoogle Scholar
21.Kholkin, A.L. and Setter, N., Appl. Phys. Lett. 71, 2854 (1997).CrossRefGoogle Scholar
22.Brody, P.S. and Crowne, F., J. Electron. Mater. 4, 955 (1975).CrossRefGoogle Scholar
23.Lines, M.E. and Glass, A.M., Principles and Applications of Ferroelectrics and Related Materials (Clarendon, Oxford, United Kingdom, 1977).Google Scholar