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A physically based model for indenter tip shape calibration for nanoindentation

Published online by Cambridge University Press:  31 January 2011

Lucas A. Berla ,
Aileen M. Allen ,
Seung Min Han  and
William D. Nix
Lucas A. Berla*
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305-4034
Aileen M. Allen
Affiliation:
Hewlett-Packard Company, Palo Alto, California 94304
William D. Nix
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305-4034
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

A new function that describes the shape of three-sided pyramidal indenters is introduced. This function differs from the polynomial tip shape function conventionally used in nanoindentation tip shape calibration in that the new function includes fewer fitting parameters with clearer physical meaning. Specifically, two of the fitting parameters integrated into the new function are the indenter’s tip radius and the slope of the indenter’s equivalent cone. Tip shape calibration data were collected with four different diamond indenter tips, and both the new function and the standard polynomial function were fit to the data. It is found that the new function can fit calibration data nearly as well as the standard polynomial function and better than existing physically based functions. Although the tip radius parameter obtained by fitting the new model to data deviates from the tip radius determined from Hertzian elastic contact, the two values are correlated.

Keywords

HardnessNanoindentation
Type
Articles
Information
Journal of Materials Research , Volume 25 , Issue 4 , April 2010 , pp. 735 - 745
Copyright
Copyright © Materials Research Society 2010

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References

REFERENCES

1.Feng, G., Nix, W.D.Indentation size effect in MgO. Scr. Mater. 51, 599 (2004)CrossRefGoogle Scholar
2.Saha, R., Nix, W.D.Effects of the substrate on the determination of thin film mechanical properties by nanoindentation. Acta Mater. 50, 23 (2002)Google Scholar
3.Shim, S., Bei, H., George, E.P., Pharr, G.M.A different type of indentation size effect. Scr. Mater. 59, 1095 (2008)CrossRefGoogle Scholar
4.Vlassak, J.J., Nix, W.D.Measuring the elastic properties of anisotropic materials by means of indentation experiments. J. Mech. Phys. Solids 42, 1223 (1994)Google Scholar
5.Hyun, S., Kraft, O., Vinci, R.P.Mechanical behavior of Pt and Pt-Ru solid-solution alloy thin films. Acta Mater. 52, 4199 (2004)CrossRefGoogle Scholar
6.Oliver, W.C., Pharr, G.M.An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992)CrossRefGoogle Scholar
7.Oliver, W.C., Pharr, G.M.Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology. J. Mater. Res. 19, 3 (2004)CrossRefGoogle Scholar
8.Pethica, J.B., Hutchings, R., Oliver, W.C.Hardness measurement at penetration depths as small as 20 nm. Philos. Mag. A 48, 593 (1983)CrossRefGoogle Scholar
9.Doerner, M.F., Nix, W.D.A method for interpreting the data from depth-sensing indentation instruments. J. Mater. Res. 1, 601 (1986)CrossRefGoogle Scholar
10.Loubet, J-L., Bauer, M., Tonck, A., Bec, S., Gauthier-Manuel, B.Nanoindentation with a surface force apparatusMechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructures edited by M. Nastasi, D.M. Parkin, and H. Gleiter (Kluwer Academic Publishers, Dordrecht, The Netherlands 1993)429447CrossRefGoogle Scholar
11.Bec, S., Tonck, A., Georges, J-M., Georges, E., Loubet, J-L.Improvements in the indentation method with a surface force apparatus. Philos. Mag. A 74, 1061 (1996)Google Scholar
12.Thurn, J., Cook, R.F.Simplified area function for sharp indenter tips in depth-sensing indentation. J. Mater. Res. 17, 1143 (2002)Google Scholar
13.Bei, H., George, E.P., Hay, J.L., Pharr, G.M.Influence of indenter tip geometry on elastic deformation during nanoindentation. Phys. Rev. Lett. 95, 045501 (2005)Google Scholar
14.Johnson, K.L.Contact Mechanics (Cambridge University Press, Cambridge, UK 1985)90104CrossRefGoogle Scholar
15.Pharr, G.M., Strader, J.H., Oliver, W.C.Critical issues in making small-depth mechanical property measurements by nanoindentation with continuous stiffness measurement. J. Mater. Res. 24, 653 (2009)Google Scholar