Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-26T23:36:11.806Z Has data issue: false hasContentIssue false
  • English
  • Français

Phase chemistry in the Ti-Si-N system: Thermochemical review with phase stability diagrams

Published online by Cambridge University Press:  03 March 2011

S. Sambasivan  and
W.T. Petuskey
S. Sambasivan
Affiliation:
Department of Chemistry, Arizona State University, Tempe, Arizona 85287-1604
W.T. Petuskey
Affiliation:
Department of Chemistry, Arizona State University, Tempe, Arizona 85287-1604
Get access

Abstract

The phase chemistry and thermodynamics of the Ti-Si-N system are reviewed leading to a revision of the ternary phase diagram at 1273 K to include the extended compositional ranges of δ-TiNx and Ti5Si3(Ny) and the compounds Ti3Si, Ti5Si4, and α-Ti. This same information is presented in the form of phase stability diagrams which plot the stability criteria for each phase as a function of thermodynamic activity of one component and the relative composition of the other two components. Plots in terms of log asi vs Ti/(Ti + N), log aN2 vs Si/(Ti + Si), and log aTi vs N/(Si + N) were constructed. All diagrams are consistent with current knowledge of phase compatibility and, therefore, are topologically correct. Further refinement will be possible as more accurate information on thermodynamics and compositional limits of solid solutions becomes available.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 9 , September 1994 , pp. 2362 - 2369
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Murarka, S. P., J. Vac. Sci. Technol. B4, 1325 (1986).CrossRefGoogle Scholar
2Desu, S. B. and Taylor, J. A., J. Am. Ceram. Soc. 73, 509 (1990).Google Scholar
3Morgan, A. E., Broadbent, E. K., Ritz, K. N., Sadana, D. K., and Burrow, B. J., J. Appl. Phys. 64, 344 (1988).CrossRefGoogle Scholar
4Barbour, J. C., Kupier, A. E., Willemsen, M. F. C., and Reader, A. H., Appl. Phys. Lett. 50, 953 (1987).Google Scholar
5Fernandez, M., Proc. Mater. Res. Soc. Symp., 1990.Google Scholar
6Fujimura, N. and Ito, T., Appl. Surf. Sci. 41, 272 (1989).Google Scholar
7Beyers, R., Sinclair, R., and Thomas, M. E., J. Vac. Sci. Technol. B2, 781 (1984).Google Scholar
8Petuskey, W. T. and Sambasivan, S. (unpublished).Google Scholar
9Wakelkamp, W., Ph. D. Dissertation, University of Eindhoven, Eindhoven, The Netherlands, 1991.Google Scholar
10Kubaschewski, O., in Atomic Energy Review, edited by Komarek, K. L. (Verlag Chemie, Vienna, 1987), p. 40.Google Scholar
11Wreidt, H. A. and Murray, W. L., in Phase Diagrams of Binary Titanium Alloys, edited by Murray, J. L. (ASM INTERNATIONAL, Metals Park, OH, 1987), p. 176.Google Scholar
12Lengauer, W., Acta Metall. Mater. 39, 2985 (1991).Google Scholar
13McClaine, L. A. and Coppel, C. P., in Equilibrium Studies of Refractory Nitrides, Part I. Details of the Apparatus and Studies of the Ti-N System, TR-AFML-65-299 (U. S. Air Force Systems Command, Res. Technol. Div., 1965).Google Scholar
14Morozova, M. P. and Khernberg, M. M., Russ. J. Phys. Chem. 40, 604 (1966).Google Scholar
15Murray, J. L., in Phase Diagrams of Binary Titanium Alloys, edited by Murray, J. L. (ASM INTERNATIONAL, Metals Park, OH, 1987), p. 289.Google Scholar
16Valhas, C., Chevalier, P. Y., and Blanquet, E., CALPHAD 13, 273 (1989).Google Scholar
17Schlesinger, M., Chem. Rev. 90, 607 (1990).Google Scholar
18Stull, D. R. and Prophet, H., in JANAF Thermochemical Tables, 2nd ed. NSRDS-NBS37 (U. S. Gov. Printing Office, Washington, DC, 1968).Google Scholar
19Borisov, Yu. S., Borisova, A. L., Kocherzhinskii, Yu. A., and Shishkin, E. A., Poroshk. Metall. (Kiev) 3, 63 (1978).Google Scholar
20Nowotny, H., in Electronic Structure and Alloy Chemistry of the Transition Elements, edited by Beck, P. A. (Interscience, New York, 1963), p. 179.Google Scholar
21Brukl, C. E., AFML-TR-65-2 (U. S. Air Force Systems Command, Res. Technol. Div., WPAFB, OH, 1966).Google Scholar
22Sambasivan, S. and Petuskey, W. T., J. Mater. Res. 7, 1473 (1992).Google Scholar
23Metselaar, R. and van Loo, F. J. J., Mater. Sci. Forum 34–36, 413 (1988).Google Scholar
24Pelton, A. and Schmalzried, H., Metall. Trans. 4, 1395 (1973).Google Scholar