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Optical measurement of the elastic moduli and thermal diffusivity of a C–N film

Published online by Cambridge University Press:  03 March 2011

Yongwu Yang ,
Keith A. Nelson  and
Farshid Adibi
Yongwu Yang
Affiliation:
Department of Chemistry, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
Keith A. Nelson
Affiliation:
Department of Chemistry, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
Farshid Adibi
Affiliation:
BIRL Industrial Research Laboratory, Northwestern University, 1081 Maple Street, Evanston, Illinois 60202
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Abstract

The elastic properties of carbon nitride (CNx) film adhered to a silicon substrate were characterized through impulsive stimulated thermal scattering (ISTS). The lowest-order pseudo-Rayleigh acoustic mode of the film was excited and monitored optically. From the measured acoustic phase velocities, the elastic moduli of the film were determined. The ISTS technique also permits measurements of the CNx thermal diffusivity. The noninvasive optical measurements described can provide a useful guide to refinements in thin film fabrication procedures and for optimization of mechanical and thermal transport properties.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 1 , January 1995 , pp. 41 - 48
Copyright
Copyright © Materials Research Society 1995

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References

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