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On the oxidation resistance of superhard Ti–Si–C–N coatings

Published online by Cambridge University Press:  31 January 2011

Yan Guo ,
Shengli Ma ,
Kewei Xu ,
Tom Bell ,
Xiaoying Li  and
Hanshan Dong
Yan Guo
Affiliation:
State-Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049, People’s Republic of China
Shengli Ma
Affiliation:
State-Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049, People’s Republic of China
Kewei Xu*
Affiliation:
State-Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049, People’s Republic of China
Tom Bell
Affiliation:
International Research Center for Surface Engineering of Materials, Xi’an Jiaotong University, Xi’an 710049, People’s Republic of China
Xiaoying Li
Affiliation:
Department of Metallurgy and Materials, The University of Birmingham, Birmingham B15 2TT, United Kingdom
Hanshan Dong
Affiliation:
Department of Metallurgy and Materials, The University of Birmingham, Birmingham B15 2TT, United Kingdom
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

The oxidation behavior of three types of plasma-enhanced chemical vapor deposition (PECVD) processed Ti–Si–C–N coatings with silicon content ranging from 4.3 to 11.6 at.% has been investigated at high temperatures. Systematic characterization was conducted to study the evolution of composition, phase constituents, hardness, surface morphologies, microstructures, and grain size during oxidation. A two-stage oxidation process was observed between 700 and 1000 °C for all three coatings. Experimental results indicate that a superhardness of 40 GPa can be maintained up to 700, 800, and 850 °C for 4.3, 7.4, and 11.6 at.% Si coatings, respectively; the dual-phased 7.4 and 11.6 at.% Si coatings show a better oxidation resistance than the single-phased 4.3 at.% Si coating. On the basis of the results, a mechanism is proposed to explain the relationship between the nanostructure and oxidation behavior.

Keywords

CoatingOxidationPlasma-enhanced CVD (PECVD) (deposition)
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 9 , September 2008 , pp. 2420 - 2428
Copyright
Copyright © Materials Research Society 2008

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References

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