Hostname: page-component-745bb68f8f-kw2vx Total loading time: 0 Render date: 2025-01-10T06:32:48.398Z Has data issue: false hasContentIssue false
  • English
  • Français

Observation, analysis, and simulation of the hysteresis of silicon using ultra-micro-indentation with spherical indenters

Published online by Cambridge University Press:  31 January 2011

E.R. Weppelmann ,
J.S. Field  and
M.V. Swain
E.R. Weppelmann
Affiliation:
CSIRO Division of Applied Physics, Lindfield, New South Wales 2070, Australia
J.S. Field
Affiliation:
Department of Mechanical Engineering, University of Sydney, New South Wales 2006, Australia
M.V. Swain
Affiliation:
CSIRO Division of Applied Physics, Lindfield, New South Wales 2070 and Department of Mechanical Engineering, University of Sydney, New South Wales 2006, Australia
Get access

Abstract

The recently reported hysteretic behavior of silicon under indentation (Clarke et al.1 and Pharret al.2-5) is investigated using an ultra-micro-indentation system with an 8.5 μm spherical-tipped indenter. The onset of “plastic” behavior during loading and hysteresis during unloading was readily observed at loads in excess of 70 mN. Cracking about the residual impression was observed only at loads of 350 mN and higher. An analysis of the data is presented that estimates the following: (1) the initial onset of deformation occurs at a mean pressure of 11.8 ± 0.6 GPa, (2) the mean pressure at higher loads is 11.3 ± 1.3 GPa, and (3) the hysteretic transition on unloading occurs at mean pressures between 7.5 and 9.1 GPa. These values are in good agreement with the accepted literature values for the known silicon transformation pressures. A simulation of the force-displacement data based on the analysis and model is presented and is found to fit the observations very well.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 4 , April 1993 , pp. 830 - 840
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Clarke, D.R., Kroll, M.C., Kirchner, P.D., Cook, R.F., and Hockey, B.J., Phys. Rev. Lett. 21, 2156 (1988).CrossRefGoogle Scholar
2Pharr, G. M., Oliver, W. C., and Clarke, D. R., Scripta Metall. 23, 1949–1952 (1989).CrossRefGoogle Scholar
3Pharr, G. M., Oliver, W. C., and Clarke, D. R., J. Elec. Mater. 19, 881–887 (1990).CrossRefGoogle Scholar
4Pharr, G. M., Oliver, W. C., and Harding, D. S., J. Mater. Res. 6, 1129–1130 (1991).CrossRefGoogle Scholar
5Pharr, G.M., in Thin Films: Stresses and Mechanical Properties III, edited by Nix, W. D., Bravman, J. C., Arzt, E., and Freund, L. B. (Mater. Res. Soc. Symp. Proc. 239, Pittsburgh, PA, 1992), pp. 301–312.Google Scholar
6Page, T.F., Oliver, W.C., and McHargue, C.J., J. Mater. Res. 7, 450–473 (1992).CrossRefGoogle Scholar
7Hu, J. Z. and Spain, I.L., Solid State Commun. 51, 263–266 (1984).CrossRefGoogle Scholar
8Hu, J.Z., Merkle, L.D., Menoni, C.S., and Spain, I.L., Phys. Rev. B 34, 4679–4684 (1986).CrossRefGoogle Scholar
9Goryunova, N. A., Borshcherskii, A. S., and Tretiakov, D. N., Physics of III TV Compounds, Semi-conductors and Semi-metals (Academic Press, San Diego, CA, 1968), Vol 4, Chap. 1.Google Scholar
10Gridneva, I.V., Milman, Yu. V., and Trefilov, V.I., Phys. Status Solidi (a) 14, 177 (1972).CrossRefGoogle Scholar
11Gilman, J.J., J. Mater. Res. 7, 535–538 (1992).CrossRefGoogle Scholar
12Bell, T. J., Field, J. S., and Swain, M. V., in Thin Films: Stresses and Mechanical Properties III, edited by Nix, W. D., Bravman, J. C., Arzt, E., and Freund, L. B. (Mater. Res. Soc. Symp. Proc. 239, Pittsburgh, PA, 1992), pp. 331–336.Google Scholar
13Field, J.S. and Swain, M. V., J. Mater. Res. 8, 297–306 (1992).CrossRefGoogle Scholar
14Hertz, H., Hertz's Miscellaneous Papers, Chaps. 5 and 6 (Macmillan, London, 1896).Google Scholar
15Johnson, K. L., Contact Mechanics (Cambridge University Press, Cambridge, 1985).CrossRefGoogle Scholar
16Francis, H. A., Trans. ASME Series H 98, 272–280 (1976).Google Scholar
17Sneddon, I.N., Proc. Cambridge Philos. Soc. 44, 429 (1948).Google Scholar
18Lawn, B.R. and Wilshaw, T. R., J. Mater. Sci. 10, 1049–1081 (1975).CrossRefGoogle Scholar
19Love, A. E. H., A Treatise on the Mathematical Theory, 4th ed. (Cambridge University Press, Cambridge, 1952).Google Scholar
20Puttock, M. J. and Thwaite, E. G., “Elastic Compression of Spheres and Cylinders at Point and Line Contact,” CSIRO Australia, National Measurement Laboratory, Technical Paper No. 25 (1969).Google Scholar
21. Bell, T. J., Bendeli, A., Field, J. S., Swain, M. V., and Thwaite, E. G., Metrologia 28, 463–469 (1991/1992).CrossRefGoogle Scholar