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Nanoindentation measurements of amorphous carbon coatings

Published online by Cambridge University Press:  31 January 2011

Ashok V. Kulkarni  and
Bharat Bhushan
Ashok V. Kulkarni
Affiliation:
Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio 43210–1107
Bharat Bhushan
Affiliation:
Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio 43210–1107
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Abstract

In this study, amorphous carbon coatings were deposited with thicknesses ranging from 20 nm to 100 nm on single-crystal silicon substrates by sputtering, ion beam, and cathodic arc deposition techniques. An indentation system with a three-plate transducer with electrostatic actuation and capacitive sensor has been used to make load displacement measurements and subsequently carry out in situ imaging of the indents. Indentation experiments were carried out using a three-sided pyramidal (Berkovich) diamond tip. Measurements include load-displacement curves and calculation of hardness and Young's modulus of elasticity at various indentation depths, studies of hysteresis behavior, creep behavior, and strain rate effect of various carbon coatings. The cathodic arc coating exhibited the highest hardness and elastic modulus followed by the sputtered and ion beam coatings.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 10 , October 1997 , pp. 2707 - 2714
Copyright
Copyright © Materials Research Society 1997

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References

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