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Microstructure of Epitaxial SrTiO3/Pt/Ti/ Sapphire Heterostructures

Published online by Cambridge University Press:  03 March 2011

Steffen Schmidt ,
Young-Woo Ok ,
Dmitri O. Klenov ,
Jiwei Lu ,
Sean P. Keane  and
Susanne Stemmer
Steffen Schmidt
Affiliation:
Materials Department, University of California, Santa Barbara, California 93106-5050
Young-Woo Ok
Affiliation:
Materials Department, University of California, Santa Barbara, California 93106-5050
Dmitri O. Klenov
Affiliation:
Materials Department, University of California, Santa Barbara, California 93106-5050
Jiwei Lu
Affiliation:
Materials Department, University of California, Santa Barbara, California 93106-5050
Sean P. Keane
Affiliation:
Materials Department, University of California, Santa Barbara, California 93106-5050
Susanne Stemmer*
Affiliation:
Materials Department, University of California, Santa Barbara, California 93106-5050
*
b) Address all correspondence to this author. e-mail: [email protected]
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Abstract

The microstructure and orientation relationships of epitaxial (111)-oriented SrTiO3 thin films grown by radio frequency magnetron sputtering on epitaxial (111)-oriented Pt/Ti electrodes on sapphire were investigated using x-ray diffraction, conventional and scanning transmission electron microscopy. We show that the epitaxial growth of (111)-oriented SrTiO3 films was promoted by thin Ti adhesion layers underneath the Pt electrode. The SrTiO3 films nucleated with two twin-related orientation variants, rotated by 180° about the 〈111〉 surface normal. The twin boundaries were oriented approximately normal to the film plane, but no strong preference for a specific boundary plane was observed. Growth mechanisms and the relationships to the dielectric properties are discussed.

Keywords

MicrostructureThin filmTransmission electron microscopy (TEM)
Type
Rapid Communications
Information
Journal of Materials Research , Volume 20 , Issue 9 , September 2005 , pp. 2261 - 2265
Copyright
Copyright © Materials Research Society 2005

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