Hostname: page-component-586b7cd67f-dsjbd Total loading time: 0 Render date: 2024-11-23T18:46:12.370Z Has data issue: false hasContentIssue false
  • English
  • Français

Microstructure and mechanical properties of Ti–Si–N coatings

Published online by Cambridge University Press:  31 January 2011

W. J. Meng ,
X. D. Zhang ,
B. Shi ,
R. C. Tittsworth ,
L. E. Rehn  and
P. M. Baldo
W. J. Meng
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70803
X. D. Zhang
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70803
B. Shi
Affiliation:
Mechanical Engineering Department, Louisiana State University, Baton Rouge, Louisiana 70803
R. C. Tittsworth
Affiliation:
Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge, Louisiana 70803
L. E. Rehn
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
P. M. Baldo
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
Get access

Abstract

A series of Ti–Si–N coatings with 0 < Si < 20 at.% were synthesized by inductively coupled plasma assisted vapor deposition. Coating composition, structure, atomic short-range order, and mechanical response were characterized by Rutherford backscattering spectrometry, transmission electron microscopy, x-ray absorption near-edge structure spectroscopy, and instrumented nanoindentation. These experiments show that the present series of Ti–Si–N coatings consists of a mixture of nanocrystalline titanium nitride (TiN) and amorphous silicon nitride (a-Si:N); i.e., they are TiN/a-Si:N ceramic/ceramic nanocomposites. The hardness of the present series of coatings was found to be less than 32 GPa and to vary smoothly with the Si composition.

Type
Articles
Information
Journal of Materials Research , Volume 17 , Issue 10 , October 2002 , pp. 2628 - 2632
Copyright
Copyright © Materials Research Society 2002

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Tanaka, Y., Ichimiya, N., Onishi, Y., and Yamada, Y., Surf. Coat. Technol. 146/147, 215 (2001).CrossRefGoogle Scholar
2.Li, X., Bhushan, B., Thin Solid Films 398/399, 313 (2001).CrossRefGoogle Scholar
3.Cao, D.M., Wang, T., Feng, B., Meng, W.J., and Kelly, K.W., Thin Solid Films 398/399, 553 (2001).CrossRefGoogle Scholar
4.Cao, D.M., Feng, B., Meng, W.J., Rehn, L.E., Baldo, P.M., and Khonsari, M.M., Appl. Phys. Lett. 79, 329 (2001).CrossRefGoogle Scholar
5.Zehnder, T. and Patscheider, T.J., Surf. Coat. Technol. 133/134, 138 (2000).CrossRefGoogle Scholar
6.Feng, B., Cao, D.M., Meng, W.J., Rehn, L.E., Baldo, P.M., and Doll, G.L., Thin Solid Films 398/399, 210 (2001).CrossRefGoogle Scholar
7.Veprek, S., Reiprich, S., and Shizhi, L., Appl. Phys. Lett. 66, 1 (1995).CrossRefGoogle Scholar
8.Veprek, S., Neiderhofer, A., Moto, K., Bolom, T., Mannling, H.D., Nesladek, P., Dollinger, G., and Bergmaier, A., Surf. Coat. Technol. 133/134, 152 (2000).CrossRefGoogle Scholar
9.Ljungcrantz, H., Oden, M., Hultman, L., Greene, J.E., and Sundgren, J.E., J. Appl. Phys. 80, 6725 (1996).CrossRefGoogle Scholar
10.Meng, W.J., Curtis, T.J., Rehn, L.E., and Baldo, P.M., Surf. Coat. Technol. 120/121, 206 (1999).CrossRefGoogle Scholar
11.Meng, W.J. and Eesley, G.L., Thin Solid Films 271, 108 (1995).CrossRefGoogle Scholar
12.Meng, W.J., Tittsworth, R.C., Jiang, J.C., Feng, B., Cao, D.M., Winkler, K., and Palshin, V., J. Appl. Phys. 88, 2415 (2000).CrossRefGoogle Scholar
13.Feng, B., Cao, D.M., Meng, W.J., Xu, J., Tittsworth, R.C., Rehn, L.E., Baldo, P.M., and Doll, G.L., Surf. Coat. Technol. 148, 153 (2001).CrossRefGoogle Scholar
14.Oliver, W.C. and Pharr, G.M., J. Mater. Res. 7, 1564 (1992).CrossRefGoogle Scholar
15.Toth, L.E., Transition Metal Carbides and Nitrides (Academic Press, New York, 1971).Google Scholar
16.Martin, J.W., Doherty, R.D., and Cantor, B., Stability of Microstructure in Metallic Systems (Cambridge University Press, New York, 1997), Chap. 5.CrossRefGoogle Scholar
17.Niederhofer, A., Bolom, T., Nesladek, P., Moto, K., Eggs, C., Patil, D.S., and Veprek, S., Surf. Coat. Technol. 146/147, 183 (2001).CrossRefGoogle Scholar