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Microstructural observation of a composite film of c-BN and h-BN phases

Published online by Cambridge University Press:  31 January 2011

Young-Joon Park ,
Young-Joon Baik ,
Jae Hyoung Choi ,
Jeong Yong Lee  and
Jun-Hee Hahn
Young-Joon Park*
Affiliation:
hin Film Technology Research Center, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 130–650, Korea
Young-Joon Baik
Affiliation:
hin Film Technology Research Center, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 130–650, Korea
Jae Hyoung Choi
Affiliation:
Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology, Daejon 305–701, Korea
Jeong Yong Lee
Affiliation:
Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology, Daejon 305–701, Korea
Jun-Hee Hahn
Affiliation:
Materials Evaluation Center, Korea Research Institute of Standards and Science (KRISS), P.O. Box 102, Yusong, Daejon 305–600, Korea
*
a)Address all correspondence to this author.
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Abstract

BN films consisting of c-BN and h-BN phases were synthesized using an ion-beam-assisted deposition process. In contrast to conventional observations, the c-BN and h-BN phases did not form separate layers, but were distributed in the form of nano-sized grains throughout the film thickness. No distinctly aligned h-BN layer was observed before the c-BN phase. Such a mixed character of the film was attributed to a localized ion bombardment effect instead of the macro-stress. Possibly because of the presence of scattered h-BN phases, the thin film described here possessed a low hardness of about 20 GPa and a low stress of about 5 GPa, compared with other reported c-BN-containing films.

Type
Articles
Information
Journal of Materials Research , Volume 15 , Issue 11 , November 2000 , pp. 2292 - 2295
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

1.Mishima, O., in Synthesis and Properties of Boron Nitride, edited by Pouch, J.J. and Alterovitz, S.A. (Trans Tech, Zürich, 1990), Vol. 54–55, p. 313.Google Scholar
2.Tanabe, N., Hayashi, T., and Iwaki, M., Diamond Relat. Mater. 1, 883 (1992).CrossRefGoogle Scholar
3.Kester, D.J. and Messier, R., J. Appl. Phys. 72, 504 (1992).CrossRefGoogle Scholar
4.Feldermann, H., Merk, R., Hofsäss, H., Ronning, C., and Zheleva, T., Appl. Phys. Lett. 74, 1552 (1999).CrossRefGoogle Scholar
5.Wada, T. and Yamashita, N., J. Vac. Sci. Technol. A10, 515 (1992).CrossRefGoogle Scholar
6.Mckenzie, D.R., Mcfall, W.D., Sainty, W.G., Davis, C.A., and Collins, R.E., Diamond Relat. Mater. 2, 970 (1993).CrossRefGoogle Scholar
7.Weber, A., Bringmann, U., Nikulski, R., and Klages, C.P., Diamond Relat. Mater. 2, 201 (1993).CrossRefGoogle Scholar
8.Kuhr, M., Reinke, S., and Kulisch, W., Diamond Relat. Mater. 4, 375 (1995).CrossRefGoogle Scholar
9.Mirkarimi, P.B., Medlin, D.L., McCarty, K.F., Dibble, D.C., Cliff, W.M., Knapp, J.A., and Barbour, J.C., J. Appl. Phys. 82, 1617 (1997).CrossRefGoogle Scholar
10.Zhou, W-L., Ikuhara, Y., Murakawa, M., Watanabe, S., and Suzuki, T., Appl. Phys. Lett. 66, 2490 (1995).CrossRefGoogle Scholar
11.Medlin, D.L., Friedmann, T.A., Mirkarimi, P.B., Cardinale, G.F., and McCarty, K.F., J. Appl. Phys. 79, 3567 (1996).CrossRefGoogle Scholar
12.Ballal, A.K., Salamanca-Riba, L., Taylor, C.A. II, and Doll, G.L., Thin Solid Films 224, 46 (1993).CrossRefGoogle Scholar
13.Lüthje, H., Bewilogua, K., Daaud, S., Johasson, M., and Hultman, L., Thin Solid Films 257, 40 (1995).CrossRefGoogle Scholar
14.Zhou, W-L., Ikuhara, Y., and Suzuki, T., Mater. Trans. JIM 37, 1122 (1996).CrossRefGoogle Scholar
15.Park, Y-J. and Baik, Y-J., Metals and Materials 5, 381 (1999).CrossRefGoogle Scholar
16.Ullmann, J., Thin Solid Films 326, 43 (1998).CrossRefGoogle Scholar
17.Kim, I.H., Kim, K.S., Kim, S.H., and Lee, S.R., Thin Solid Films 290–291, 120 (1996).CrossRefGoogle Scholar
18.Mirkarimi, P.B., McCarty, K.F., Medlin, D.L., Wolfer, T.A., Friedmann, T.A., Klaus, E.J., Cardinale, G.F., and Howitt, D.G., J. Mater. Res. 9, 2925 (1994).CrossRefGoogle Scholar