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Microstructural characterization of a titanium-tungsten oxide gas sensor

Published online by Cambridge University Press:  31 January 2011

Matteo Ferroni ,
Vincenzo Guidi ,
Giuliano Martinelli  and
Giorgio Sberveglieri
Matteo Ferroni
Affiliation:
INFM, Department of Physics, University of Ferrara, Via Paradiso, 12-44100 Ferrara, Italy
Vincenzo Guidi
Affiliation:
INFM, Department of Physics, University of Ferrara, Via Paradiso, 12-44100 Ferrara, Italy
Giuliano Martinelli
Affiliation:
INFM, Department of Physics, University of Ferrara, Via Paradiso, 12-44100 Ferrara, Italy
Giorgio Sberveglieri
Affiliation:
INFM, Department of Chemistry and Physics for Materials, University of Brescia, Via Valotti, 9-25133 Brescia, Italy
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Abstract

Thin films of Ti–W–O were prepared from a W–Ti alloy target by rf magnetron sputtering in reactive atmosphere. Analysis devoted to investigate the microstructural properties of this material was carried out in order to explain the origin for the high sensing performance of a W–Ti-oxide gas sensor. Scanning and transmission electron microscopy techniques showed that after annealing the film consists of a polycrystalline layer, isostructural to tetragonal WO3, over which crystallites of pure WO3 are dispersed. The WO3 crystallites are insulated from each other and do not enter into the process of conduction of the layer. It was shown that Ti is soluted in the tetragonal WO3 lattice of the underlying layer. This layer exhibits fine granularity, which is an optimal feature for materials suited to gas sensing.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 3 , March 1997 , pp. 793 - 798
Copyright
Copyright © Materials Research Society 1997

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References

1.Azad, A. M., Akbar, S. A., Mhaisalkar, S. G., Birkefeld, L. D., and Goto, K. S., J. Electrochem. Soc. 139, 3690 (1992).CrossRefGoogle Scholar
2.Yamazoe, N. and Miura, N., Sensors and Actuators B 20, 95 (1994), and references therein.CrossRefGoogle Scholar
3. A complete view on this topic can be found in Sensors for Domestic Applications, edited by D'Amico, A. and Sberveglieri, G. (Proc. First European School on Sensors) (World Scientific, NJ, 1995).CrossRefGoogle Scholar
4.Natale, C. Di, Davide, F. A. M., D'Amico, A., Faglia, G., Nelli, P., Perego, C., and Sberveglieri, G., Sensors and Actuators B 24–25, 801 (1995); H. Nanto, H. Sokooshi, and T. Kawai, Sensors and Actuators B 13–14, 715 (1993).CrossRefGoogle Scholar
5.Hellmich, W., Krenkow, A., Chr. Bosch-Braunmuhl, v., Mueller, G., Perego, C., Faglia, G. and Sberveglieri, G., in Proc. 2nd East Asia Conference on Chemical Sensors 141, (Beijing, 1995).Google Scholar
6.Sberveglieri, G., Sensors and Actuators B 23, 103 (1995).CrossRefGoogle Scholar
7.Sberveglieri, G., Faglia, G., Groppelli, S., and Nelli, P., in 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91, San Francisco, 1991), p. 165.Google Scholar
8.Cheong, H., Choi, J., Kim, H. P., Kim, J. M., Kim, J., and Churn, G., Sensors and Actuators B 9, 227 (1992).CrossRefGoogle Scholar
9.Mizsei, J., Sensors and Actuators B 23, 173 (1995).CrossRefGoogle Scholar
10.Depero, L. E., Perego, C., Sangaletti, L., and Sberveglieri, G., in Polycrystalline Thin Films: Structure, Texture, Properties and Applications II, edited by Frost, H. J., Ross, C. A., Parker, M. A., and Holm, E. A., (Proc. of the MRS Full Meeting 1995) (Boston, 1996).Google Scholar
11.Sberveglieri, G., Depero, L. E., Ferroni, M., Guidi, V., Martinelli, G., Nelli, P., Perego, C., and Sangaletti, L., Adv. Mater. 8, (1996).CrossRefGoogle Scholar
12.Sberveglieri, G., Depero, L. E., Groppelli, S., and Nelli, P., Sensors and Actuators B 26–27, 89 (1995).CrossRefGoogle Scholar
13.Nelli, P., Depero, L. E., Ferroni, M., Groppelli, S., Guidi, V., Ronconi, F., Sangaletti, L., and Sberveglieri, G., Sensors and Actuators B 31, 1 (1996).CrossRefGoogle Scholar
14. Inorganic Crystal Structure Database, G'Melin Institut FIZ Karlsruhe, Release 94/1.Google Scholar
15.Hansen, M., in Constitution of Binary Alloys (McGraw-Hill Book Company Inc., New York, Toronto, London, 1958), p. 1076.Google Scholar
16.D'Amico, A., Natale, C. Di, and Taroni, A., in Sensors for Domestic Applications, edited by D'Amico, A. and Sberveglieri, G. (Proc. First European School on Sensors) (World Scientific, NJ, 1995), p. 8.CrossRefGoogle Scholar
17.Madou, M. J. and Morrison, S. R., in Chemical sensing with solid state devices, edited by Harcourt-Brace-Jovanovich (Academic Press Inc., Boston, 1989), p. 74.Google Scholar
18.Yamazoe, N. and Miura, N., in Some Basic Aspects of Semiconductor Gas Sensors in Chemical Sensor Technology, edited by Yamauchi, S. (Kodansha and Elsevier, Tokyo and Amsterdam, 1992), Vol. 4, pp. 19–42.Google Scholar