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Micropipes in Silicon Carbide Crystals: Do all Screw Dislocations have Open Cores?

Published online by Cambridge University Press:  31 January 2011

William M. Vetter  and
Michael Dudley
William M. Vetter
Affiliation:
Department of Materials Science and Engineering, State University of New York at Stony Brook, Stony Brook, New York 11794-2275
Michael Dudley
Affiliation:
Department of Materials Science and Engineering, State University of New York at Stony Brook, Stony Brook, New York 11794-2275
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Abstract

Micropipes in a 6H–SiC semiconductor wafer were studied by scanning electron and atomic force microscopy. The screw dislocations intersecting the wafer's surface were located by etch pitting, and their Burgers vectors determined by x-ray topography. The etch pits were eroded into smooth craters by ion beam etching to expose levels of dislocation line from inside the sample's bulk. There a micropipe's diameter is distant from surface relaxation effects. Hollow cores (micropipes) were observed at the base of the craters whose screw dislocations had Burgers vectors of magnitude three multiples of the c-lattice parameter and higher. Screw dislocations with 1c and 2c Burgers vectors had no associated micropipes.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 15 , Issue 8 , August 2000 , pp. 1649 - 1652
Copyright
Copyright © Materials Research Society 2000

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