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Micromechanical characterization of chemically vapor deposited ceramic films

Published online by Cambridge University Press:  03 March 2011

J.M. Grow  and
R.A. Levy
J.M. Grow
Affiliation:
New Jersey Institute of Technology, Newark, New Jersey 07102
R.A. Levy
Affiliation:
New Jersey Institute of Technology, Newark, New Jersey 07102
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Abstract

In this study, nanoindentation is used to determine Young's modulus of chemically vapor deposited films consisting of silicon carbide, silicon nitride, boron carbide, boron nitride, and silicon dioxide. Diethylsilane and ditertiarybutylsilane were used as precursors in the synthesis of the silicon-based material, while triethylamine borane complex was used for the boron-based material. The modulus of these films was observed to be dependent on the processing conditions and resulting composition of the deposits. For the silicon carbide, silicon nitride, boron carbide, and boron nitride films, the carbon content in the films was observed to increase significantly with higher deposition temperatures, resulting in a corresponding decrease in values of Young's modulus. The composition of the silicon dioxide films was near stoichiometry over the investigated deposition temperature range (375–475 °C) with correspondingly small variations in the micromechanical properties. Subsequent annealing of these oxide films resulted in a significant increase in the values of Young's modulus due to hydrogen and moisture removal.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 8 , August 1994 , pp. 2072 - 2078
Copyright
Copyright © Materials Research Society 1994

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