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A method for interpreting the data from depth-sensing indentation instruments

Published online by Cambridge University Press:  31 January 2011

M.F. Doerner  and
W.D. Nix
M.F. Doerner
Affiliation:
IBM General Products Division, San Jose, California 95193 Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
W.D. Nix
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
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Abstract

Depth-sensing indentation instruments provide a means for studying the elastic and plastic properties of thin films. A method for obtaining hardness and Young's modulus from the data obtained from these types of instruments is described. Elastic displacements are determined from the data obtained during unloading of the indentation. Young's modulus can be calculated from these measurements. In addition, the elastic contribution to the total displacement can be removed in order to calculate hardness. Determination of the exact shape of the indenter at the tip is critical to the measurement of both hardness and elastic modulus for indentation depths less than a micron. Hardness is shown to depend on strain rate, especially when the hardness values are calculated from the data along the loading curves.

Type
Articles
Information
Journal of Materials Research , Volume 1 , Issue 4 , August 1986 , pp. 601 - 609
Copyright
Copyright © Materials Research Society 1986

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