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Mechanical property development in reactively sputtered tantalum carbide/amorphous hydrocarbon thin films

Published online by Cambridge University Press:  01 June 2006

Ryan D. Evans ,
Gary L. Doll  and
Jeffrey T. Glass
Ryan D. Evans*
Affiliation:
The Timken Company, Canton, Ohio 44706; and Case Western Reserve University, Cleveland, Ohio 44106
Gary L. Doll
Affiliation:
The Timken Company, Canton, Ohio 44706
Jeffrey T. Glass
Affiliation:
Duke University, Durham, North Carolina 27708
*
a) Address correspondence to this author. e-mail: [email protected]
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Abstract

Hardness, elastic modulus, and stress directly influence the ability of tantalum carbide/amorphous hydrocarbon (TaC/a-C:H) thin films to enhance the wear-resistance of steel tribological component surfaces. Designed factorial experiments enabled an evaluation of the effects of acetylene flow rate (QC2H2), direct current bias voltage level (Vb), and substrate rotation rate (ωRot) during deposition on the mechanical properties of reactively sputtered TaC/a-C:H films. Significant relationships were found between compressive stress level and Vb, whereas hardness and elastic modulus were dependent primarily on Vb and secondarily on QC2H2 within the studied parameter space. It is proposed that effects of ion bombardment on the a-C:H phase during growth are responsible for property dependencies on Vb. Decreases in hardness and elastic modulus with increasing QC2H2 are attributed to increased hydrogen concentration and a concomitant decreased volume fraction of TaC crystallites in the films.

Keywords

FilmHardnessNanostructure
Type
Articles
Information
Journal of Materials Research , Volume 21 , Issue 6 , June 2006 , pp. 1500 - 1511
Copyright
Copyright © Materials Research Society 2006

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