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Laser-Induced Growth of Titanium Nitride Microcolumns on Biased Titanium Targets

Published online by Cambridge University Press:  03 March 2011

E. György ,
A. Pérez del Pino ,
P. Serra  and
J.L. Morenza
E. György*
Affiliation:
Universitat de Barcelona, Departament de Física Aplicada i Òptica, E-08028 Barcelona, Spain
A. Pérez del Pino
Affiliation:
Universitat de Barcelona, Departament de Física Aplicada i Òptica, E-08028 Barcelona, Spain
P. Serra
Affiliation:
Universitat de Barcelona, Departament de Física Aplicada i Òptica, E-08028 Barcelona, Spain
J.L. Morenza*
Affiliation:
Universitat de Barcelona, Departament de Física Aplicada i Òptica, E-08028 Barcelona, Spain
*
b)Address all correspondence to this author. e-mail: [email protected]
b)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Titanium targets with a bias voltage ranging from −500 to +500 V were submitted to multipulse high repetition rate Nd:yttrium aluminum garnet (YAG; λ = 1.064 μm, τ ∼ 300 ns, ν = 30 kHz) laser irradiations in nitrogen at intensity values below the single-pulse melting threshold. The morphology of the TiN structures formed under the cumulative action of the laser pulses on the surface of the unbiased and biased targets was investigated by profilometry and scanning electron microscopy. Under these irradiation conditions, a specific columnar surface microrelief developed. The height of the microcolumns reached about 10–15 μm, and their diameter about 1–2 μm. The development of TiN microcolumns was enhanced by the applied bias voltage. The enhancement in the negative biased samples was stronger than that in the positive biased ones.

Keywords

Laser-induced reactionStructuralSurface reaction
Type
Articles
Information
Journal of Materials Research , Volume 20 , Issue 1 , January 2005 , pp. 62 - 67
Copyright
Copyright © Materials Research Society 2004

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