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Kinetics of iron-promoted silicon nitridation

Published online by Cambridge University Press:  29 June 2016

William R. Moser ,
Dean S. Briere ,
Richard Correia  and
George A. Rossetti Jr.
William R. Moser
Affiliation:
Department of Chemical Engineering, Worcester Polytechnic Institute, Worcester, Massachusetts 01609
Dean S. Briere
Affiliation:
Department of Chemical Engineering, Worcester Polytechnic Institute, Worcester, Massachusetts 01609
Richard Correia
Affiliation:
Department of Chemical Engineering, Worcester Polytechnic Institute, Worcester, Massachusetts 01609
George A. Rossetti Jr.
Affiliation:
High Performance Ceramics Division, Norton Company, Northboro, Massachusetts 01532
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Abstract

Using a material synthesis technique to optimize the coverage of metals on the surface of silicon, the iron-promoted nitridation of high-purity silicon was studied. The kinetic results indicated that conversions to silicon nitride were directly dependent upon the surface loading by iron up to the point of excess coverage where the rates dropped sharply. A further modification of the iron-promoted system by alkali and alkaline earth metals sharply increased the degree of conversion. The results suggested that the chief effect of the metal promotion was to reduce nitridation induction times and to disrupt the oxided silicon surface. Reaction rates were enhanced by the iron promoter to the extent that the silicon surface was covered and deoxidized by iron.

Type
Articles
Information
Journal of Materials Research , Volume 1 , Issue 6 , December 1986 , pp. 797 - 802
Copyright
Copyright © Materials Research Society 1986

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