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Isotopic effects in a–C:(H/D) films deposited from methane/hydrogen RF plasmas

Published online by Cambridge University Press:  31 January 2011

D. Boutard  and
W. Möller
D. Boutard
Affiliation:
Max-Planck-Institut für Plasmaphysik, EURATOM Association, D-8046 Garching, Federal Republic of Germany
W. Möller
Affiliation:
Max-Planck-Institut für Plasmaphysik, EURATOM Association, D-8046 Garching, Federal Republic of Germany
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Abstract

Hard amorphous hydrocarbon films have been deposited by RF glow discharges in methane/hydrogen mixtures with different hydrogen isotopes. For CH4 + D2 and CD4 + H2 gas mixtures, the film growth rate, the density, the refractive index, and the isotopic hydrogen content are obtained as functions of the process gas composition. Further, the hydrogen loss induced by 15 keV helium ions is studied. The results are qualitatively interpreted in terms of different effects of ion bombardment during film deposition which influence the properties of the resulting films.

Type
Diamond and Diamond-Like Materials
Information
Journal of Materials Research , Volume 5 , Issue 11 , November 1990 , pp. 2451 - 2455
Copyright
Copyright © Materials Research Society 1990

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References

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