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Ion microprobe analysis of laser-deposited Y–Ba–Cu thin film: Effects of anneal temperature
Published online by Cambridge University Press: 31 January 2011
Abstract
We have employed high spatial resolution (<50 nm) SIMS to study thin film deposited on SrTiO3, produced by pulsed laser evaporation of bulk stoichiometric YBa2Cu3Ox pellets derived from either BaCO3 or Ba3N2. The grain growth, film-substrate interaction, and carbon contamination of the films were examined as a function of post-deposition anneal temperature ranging between 700 °C and 900 °C. On the surface of both types of film, we found overgrowth crystals, which are enriched in copper, that increased in size from a few tenths of a micron to several microns with increasing anneal temperature. Above 800 °C, the film forms a polycrystalline structure with grain size of ∼1 micron. With increasing anneal temperature, more strontium was observed on the surface of the film. Films prepared from YBa2Cu3Ox targets derived from BaCO3 and Ba3N2 were both contaminated with carbon: however, only the former showed segregated carbon along the grain boundaries of the polycrystalline film annealed at 900 °C.
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