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Investigation of nitrogen-doped TiO2 thin films grown by reactive pulsed laser deposition

Published online by Cambridge University Press:  31 January 2011

G. Sauthier ,
E. György  and
A. Figueras
G. Sauthier
Affiliation:
Consejo Superior de Investigaciones Cientificas, Instituto de Ciencia de Materiales de Barcelona, (ICMAB-CSIC), Centre d’Investigacions en Nanociència i Nanotecnologia, (CIN2-CSIC), Campus UAB, 08193 Bellaterra, Spain
E. György*
Affiliation:
Consejo Superior de Investigaciones Cientificas, Instituto de Ciencia de Materiales de Barcelona, (ICMAB-CSIC), Centre d’Investigacions en Nanociència i Nanotecnologia, (CIN2-CSIC), Campus UAB, 08193 Bellaterra, Spain; and National Institute for Lasers, Plasma and Radiations Physics, 77125 Bucharest, Romania
A. Figueras
Affiliation:
Consejo Superior de Investigaciones Cientificas, Centre d’Investigacions en Nanociència i Nanotecnologia, (CIN2-CSIC), Campus UAB, 08193 Bellaterra, Spain
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Nitrogen-doped titanium dioxide (TiO2) thin films were synthesized on glass substrates by reactive pulsed laser deposition technique (PLD). A frequency quadrupled Nd:YAG (λ = 266 nm, τFWHM ≅ 5 ns, ν = 10 Hz) laser source was used for the irradiations of TiO2 targets. The experiments were performed in controlled reactive atmosphere consisting of mixtures of oxygen and nitrogen gases. We demonstrated that there exists the possibility for the accurate control of the nitrogen incorporation through the growth parameters, i.e., the nitrogen partial pressure in the reaction enclosure. The substitutional nitrogen doping of the anatase phase TiO2 thin films allows for the continuous shift of the optical absorption edge towards the visible spectral range. When a threshold value of the nitrogen dopant level is surpassed the crystallization structure of the TiO2 anatase phase thin films changes, and the onset of a stable titanium-oxinitride phase formation takes place.

Keywords

DopantLaser ablationLaser-induced reaction
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 9 , September 2008 , pp. 2340 - 2345
Copyright
Copyright © Materials Research Society 2008

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