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Intrinsic stresses in compositionally modulated Au-Ni thin films and the supermodulus effect

Published online by Cambridge University Press:  03 March 2011

Shefford P. Baker  and
William D. Nix
Shefford P. Baker
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
William D. Nix
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
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Abstract

The stresses that arise in compositionally modulated Au-Ni thin films as a result of the constraint of the substrate were determined from the curvatures of micrometer-scale bilayer cantilever beams consisting of a silicon dioxide layer upon which the metal film had been deposited. These substrate interaction stresses were found to vary strongly with the wavelength of the composition modulation. Simulations of the bulge test show that such stresses can account for the major features of the “supermodulus effect” as artifacts of the analysis method.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 12 , December 1994 , pp. 3145 - 3152
Copyright
Copyright © Materials Research Society 1994

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