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Influence of the preparing conditions on the physicochemical characteristics of glasses for thick film hybrid microelectronics

Published online by Cambridge University Press:  03 March 2011

M. Prudenziati
Affiliation:
Department of Physics, University of Modena, Via G. Campi 213/A, 41100 Modena, Italy
B. Morten
Affiliation:
Department of Physics, University of Modena, Via G. Campi 213/A, 41100 Modena, Italy
P. Savigni
Affiliation:
Department of Physics, University of Modena, Via G. Campi 213/A, 41100 Modena, Italy
G. Guizzetti
Affiliation:
Department of Physics, “A. Volta”, University of Pavia, Via A. Bassi 6, 27100, Pavia, Italy
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Abstract

Seven batches of a high-lead glass were used for the preparation of RuO2-based thick film resistors. Investigation of their electrical properties showed a lack of reproducibility of results whose origin was related to changes of the physicochemical properties of the glassy matrix. A systematic investigation of the glass batches, both in form of frit powders and screen printed and fired layers, was carried out with several spectroscopies to detect changes in composition and structure. The spectroscopic methods included x-ray Energy Dispersive Fluorescence (EDS), Scanning Electron Microscopy (SEM), Atomic Absorption (AA), diffuse optical reflection of the powders and specular reflection of the layers, optical transmission, and other complementary methods. The dissolution of Al, due to interaction between the glasses and the alumina substrate, as well as the diffusivity and solubility of Ag due to interaction with the Ag-bearing terminations were measured. The results demonstrated that, apart from small compositional differences, the various batches were characterized by differences in residual stresses, redox reactions, and “microstructure.” The latter was responsible for very notable differences in the optical properties of the glasses, which in turn are closely related with the difference in atomic solubility and diffusivity. Optical spectroscopies have been found to be a suitable means for testing reproducible preparation methods of glass frits for thick-film hybrid microelectronics.

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Articles
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1Licari, J. J. and Enlow, L. R., Hybrid Microcircuit Technology Handbook (Noyes Publications, Park Ridge, NJ, 1988).Google Scholar
2Hoffman, L. C., Ceram. Bull. 63, 572 (1984).Google Scholar
3Vest, R. W., Ceram. Bull. 65, 631 (1986).Google Scholar
4Vest, R. W., Thick Film Glasses, Report Contract No. N00173.Col42 for Naval Research Lab. (1978, unpublished).Google Scholar
5Prudenziati, M., Morten, B., Cilloni, F., Ruffi, G., and Sacchi, M., J. Appl. Phys. 65, 146 (1989).CrossRefGoogle Scholar
6Criss, J. W. and Birks, L. S., in Electron Microprobe, edited by McKinley, T. D., Heinrich, K.F. J., and Wittry, D.B. (Wiley, New York, 1966), p. 217.Google Scholar
7Jialiang, Yi, J. Non-Cryst. Solids 84, 114 (1986).CrossRefGoogle Scholar
8Tomozawa, M. and Doremus, R., Treatise on Materials Science and Technology (Academic Press Inc., London, 1979), Vol. 17, pp. 71110.Google Scholar
9Vogel, W., Chemistry of Glasses (The American Ceramic Society Inc., Westerville, OH, 1985), pp. 6995.Google Scholar
10Barbalescu, A. and Sincan, L., Phys. Status Solidi A 85, K129 (1984).CrossRefGoogle Scholar
11Wilburn, F. W. and Dawson, J. B., in Differential Thermal Analysis, Sect. A, edited by Mackenzie, R. C. (Academic Press Inc., London, 1960).Google Scholar
12Rawson, H., Properties and Applications of Glass (Elsevier, Amsterdam, 1980).Google Scholar
13Ramsey, T. H., Solid State Technol. 15, 29 (1972).Google Scholar
14Holloway, D. G., The Physical Properties of Glass (Wykeham Publications Ltd., London, 1973), p. 35.Google Scholar
15Stokes, J., Platinum Metal Rev. 31 (2), 54 (1987).CrossRefGoogle Scholar
16Hansen, M., Constitution of Binary Alloys (McGraw-Hill, New York, 1958).CrossRefGoogle Scholar
17Bourdillon, A. J., Khumalo, F., and Bordas, J., Philos. Mag. B–37, 731 (1978).Google Scholar
18Prudenziati, M., Morten, B., Ruffl, G., Argentino, E., and Jachetti, C., 7th Europ. Hybrid Microel. Conf., Hamburg, FRG, May 1989 (unpublished).Google Scholar
19Prudenziati, M., Sirotti, F., Sacchi, M., Morten, B., Tombesi, A., and Akomolafe, T., Active and Passive Electr. Comp. 14, 163 (1991).Google Scholar
20Hlavac, J., Glass Science and Technology, 4 (Elsevier, New York, Prague, Amsterdam, 1983), p. 31.Google Scholar
21Gottardi, V., Locardi, B., Bianchini, A., and Martini, P. L., Vetri e Silicati 64, 5 (1961).Google Scholar
22Weyl, W. A., Coloured Glasses (Soc. of Glass Technol., Sheffield, England, 1967).Google Scholar
23Cohen, B. M., Uhlmann, D. R., and Shaw, R. R., J. Non-Cryst. Solids 12, 177 (1973).CrossRefGoogle Scholar
24Stroud, J. S., J. Am. Ceram. Soc. 54, 401 (1971).CrossRefGoogle Scholar
25Worrel, C. A. and Henshall, T., J. Non-Cryst. Solids 29, 283 (1978).CrossRefGoogle Scholar
26Bamford, R. C., Colour Generation and Control in Glass (Elsevier, Amsterdam, New York, 1977).Google Scholar
27Wood, S. and Blachere, J. R., J. Am. Ceram. Soc. 59, 517 (1976).CrossRefGoogle Scholar
28Ohtake, K., Kariya, M., and Ichimura, T., J. Non-Cryst. Solids 27, 99 (1978).CrossRefGoogle Scholar
29Frischat, G. R. and Beier, W., J. Non-Cryst. Solids 71, 77 (1985).CrossRefGoogle Scholar
30Brückner, R., in Current Topics on Non-Crystalline Solids, edited by Baro, M. D. and Clavaguera, N. (1988), p. 109.Google Scholar