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Influence of heat treatment on LiNbO3 thin films prepared on Si(111) by the polymeric precursor method

Published online by Cambridge University Press:  31 January 2011

V. Bouquet ,
E. Longo ,
E. R. Leite  and
J. A. Varela
V. Bouquet
Affiliation:
Departamento de Química, LIEC, Universidade Federal de São Carlos, P.O. Box 676, 13565-905 São Carlos, SP, Brazil
E. Longo
Affiliation:
Departamento de Química, LIEC, Universidade Federal de São Carlos, P.O. Box 676, 13565-905 São Carlos, SP, Brazil
E. R. Leite*
Affiliation:
Departamento de Química, LIEC, Universidade Federal de São Carlos, P.O. Box 676, 13565-905 São Carlos, SP, Brazil
J. A. Varela
Affiliation:
Instituto de Química, Universidade Estadual Paulista, P.O. Box 355, 14884-970, Araraquara, SP, Brazil
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

The effects of heat-treatment temperature on LiNbO3 thin films prepared by the polymeric precursor method were investigated. The precursor solution was deposited on Si(111) substrates by dip coating. X-ray diffraction and thermal analyses revealed that the crystallization process occurred at a low temperature (420 °C) and led to films with no preferential orientation. High-temperature treatments promoted formation of the LiNb3O8 phase. Scanning electron microscopy, coupled with energy dispersive spectroscopy analyses, showed that the treatment temperature also affected the film microstructure. The surface texture—homogeneous, smooth, and pore-free at low temperature—turned into an “islandlike” microstructure for high-temperature treatments.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 7 , July 1999 , pp. 3115 - 3121
Copyright
Copyright © Materials Research Society 1999

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