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High Strength, Electrically Conductive Pore-free TiO2 Ceramics made by Hot Isostatic Pressing

Published online by Cambridge University Press:  31 January 2011

Yukio Kishi ,
Katsuhiko Ogura ,
Kiichiro Kamata ,
Hidetoshi Saitoh  and
Keizo Uematsu
Yukio Kishi
Affiliation:
Nihon Ceratec Co., Ltd., 3–5, Ake-dori, Izumi, Sendai, Miyagi 981–32, Japan
Katsuhiko Ogura
Affiliation:
Nihon Ceratec Co., Ltd., 3–5, Ake-dori, Izumi, Sendai, Miyagi 981–32, Japan
Kiichiro Kamata
Affiliation:
Department of Chemistry, Nagaoka University of Technology, 1603–1, Kamitomioka, Nagaoka, Niigata 940–21, Japan
Hidetoshi Saitoh
Affiliation:
Department of Chemistry, Nagaoka University of Technology, 1603–1, Kamitomioka, Nagaoka, Niigata 940–21, Japan
Keizo Uematsu
Affiliation:
Department of Chemistry, Nagaoka University of Technology, 1603–1, Kamitomioka, Nagaoka, Niigata 940–21, Japan
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Abstract

A high-purity, single-phase TiO2 ceramic with high density, strength, and electrical conduction was developed as a key structural material for the production equipment of semiconductors. Green bodies were made of high purity rutile TiO2 of very fine powder. They were sintered in air at 1200 °C for 2 h and then were hot isostatically pressed (HIPed) in argon at 1000 °C, 150 MPa for 2 h. HIPed TiO2 ceramics were found to be electrically conductive and pore free. Their relative density, specific resistance, and bending strength were 100%, 1 Ω ·cm, and 300 MPa, respectively. No strength degradation was found to the temperature up to 1000 °C. This material has high potential for use as electrically conductive structure materials in the semiconductor industry.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 4 , April 1997 , pp. 1056 - 1061
Copyright
Copyright © Materials Research Society 1997

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