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Growth structure of yttria-stabilized-zirconia films during off-normal ion-beam-assisted deposition

Published online by Cambridge University Press:  31 January 2011

Y. Iijima ,
M. Hosaka ,
N. Tanabe ,
N. Sadakata ,
T. Saitoh ,
O. Kohno  and
K. Takeda
Y. Iijima*
Affiliation:
Materials Research Lab., Fujikura Ltd., 1–5-1, Kiba, Koto-ku, Tokyo 135, Japan
M. Hosaka
Affiliation:
Materials Research Lab., Fujikura Ltd., 1–5-1, Kiba, Koto-ku, Tokyo 135, Japan
N. Tanabe
Affiliation:
Materials Research Lab., Fujikura Ltd., 1–5-1, Kiba, Koto-ku, Tokyo 135, Japan
N. Sadakata
Affiliation:
Materials Research Lab., Fujikura Ltd., 1–5-1, Kiba, Koto-ku, Tokyo 135, Japan
T. Saitoh
Affiliation:
Materials Research Lab., Fujikura Ltd., 1–5-1, Kiba, Koto-ku, Tokyo 135, Japan
O. Kohno
Affiliation:
Materials Research Lab., Fujikura Ltd., 1–5-1, Kiba, Koto-ku, Tokyo 135, Japan
K. Takeda
Affiliation:
Super-GM, 5–14–10, Nishitenma, Osaka 530, Japan
*
a)Address correspondence to this author.[email protected]
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Abstract

Biaxially aligned YSZ thin films with strong [100] fiber texture were formed on a polycrystalline Ni-based alloy by off-normal ion-beam-assisted deposition. Growth structures were characterized by x-ray diffraction (XRD), transmission electron microscopy (TEM), atomic force microscopy (AFM), etc., and the alignment mechanism was discussed using a selective growth model. Peculiar structural evolution of the crystalline orientation was observed and its development was well described by an exponential equation. It was explained as a collaboration of an anisotropic growth condition and epitaxial crystallization. The [100] fiber texture was formed by columnar structures of diameter of 30–100 nm, which were composed of 5–10 nm diameter crystallites. Very smooth surfaces were observed by AFM imaging with a roughness of 2–3 nm and a peculiar ripple structure. The origin of the azimuthal alignment was discussed with emphasis on the surface structure of YSZ films produced using ion-beam-assisted deposition (IBAD) and the etching rate measurements of (100) surfaces of YSZ single crystals.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 11 , November 1998 , pp. 3106 - 3113
Copyright
Copyright © Materials Research Society 1998

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