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Growth of highly oriented SnO2 thin films on glass substrate from tetra-n-butyltin by the spray pyrolysis technique

Published online by Cambridge University Press:  31 January 2011

I. Yagi ,
Y. Hagiwara ,
K. Murakami  and
S. Kaneko
I. Yagi
Affiliation:
Graduate School of Electronic Science and Technology, Shizuoka University, Johoku, Hamamatsu 432, Japan
Y. Hagiwara
Affiliation:
Research and Development Center, Kawai Musical Instruments Mfg. Co., Terajima, Hamamatsu 430, Japan
K. Murakami
Affiliation:
Research Institute of Electronics, Shizuoka University, Johoku, Hamamatsu 432, Japan
S. Kaneko
Affiliation:
Department of Materials Science and Technology, Shizuoka University, Johoku, Hamamatsu 432, Japan
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Abstract

Highly oriented SnO2 thin films have been grown successfully from tetra-n-butyltin on heated glass substrates by a pneumatic spraying system. The effects of film growth rate and substrate temperature on the microstructures of the films were investigated by x-ray diffraction and scanning electron microscopy. The SnO2 films of preferentially oriented (110) crystal plane were grown under the optimum growth conditions.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 8 , Issue 7 , July 1993 , pp. 1481 - 1483
Copyright
Copyright © Materials Research Society 1993

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References

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