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Giant magnetoimpedance and stress-impedance effects in multilayered FeSiB/Cu/FeSiB films with a meander structure

Published online by Cambridge University Press:  06 January 2012

Xin-Hui Mao ,
Yong Zhou ,
Ji-An Chen ,
Jin-Qiang Yu  and
Bing-Chu Cai
Xin-Hui Mao
Affiliation:
Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Huashan Road 1954, Shanghai 200030, People's Republic of China
Yong Zhou
Affiliation:
Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Huashan Road 1954, Shanghai 200030, People's Republic of China
Ji-An Chen
Affiliation:
Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Huashan Road 1954, Shanghai 200030, People's Republic of China
Jin-Qiang Yu
Affiliation:
Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Huashan Road 1954, Shanghai 200030, People's Republic of China
Bing-Chu Cai
Affiliation:
Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Huashan Road 1954, Shanghai 200030, People's Republic of China
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Abstract

Giant magnetoimpedance (GMI) and giant stress-impedence (GSI) effects were realized in multilayered FeSiB/Cu/FeSiB films with a meander structure by magnetron sputtering on thin glass substrates. The GMI and GSI effects were studied in the frequency range of 1–40 MHz for the multilayered FeSiB/Cu/FeSiB films. Experimental results show that a large negative GMI ratio of –23% is obtained at Ha=12 kA/m for a frequency of 20 MHz. The GSI ratio is –20% for a frequency of 1 MHz with the deflection of 150μm of the multilayered FeSiBsCu/FeSiB films. The GSI effect is attractive for stress or pressure sensor applications.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 4 , April 2003 , pp. 868 - 871
Copyright
Copyright © Materials Research Society 2003

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References

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