Hostname: page-component-586b7cd67f-t7czq Total loading time: 0 Render date: 2024-11-26T23:43:40.547Z Has data issue: false hasContentIssue false

Fracture surface analysis of free-standing diamond films

Published online by Cambridge University Press:  03 March 2011

L.P. Hehn
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611
Z. Chen
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611
J.J. Mecholsky Jr.
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611
P. Klocek
Affiliation:
Texas Instruments, Dallas, Texas 75265
J.T. Hoggins
Affiliation:
Texas Instruments, Dallas, Texas 75265
J.M. Trombetta
Affiliation:
Texas Instruments, Dallas, Texas 75265
Get access

Abstract

Free-standing CVD diamond disk-shaped films of varying thicknesses between ∼40 and 1000 μm were fractured in ball-on-ring flexure using a high-precision hydraulic testing machine. Some of the films were smooth on the side formerly in contact with the substrate and rough (large crystallites) on the reverse side and some of the films were polished. Raman spectroscopic examination showed some of the films to be of high quality and others to be of lower quality (higher levels of non-diamond carbon mixed with diamond phase). All fracture surfaces were examined to identify the origin of failure. Strength varied between 650 and 971 MPa, and the fracture toughness was determined from fracture surface analysis to average 8 ± 1 MPam1/2.

Type
Articles
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Drory, M. D. and Gardinier, C. F., J. Am. Ceram. Soc. 74 (12), 31483150 (1991).CrossRefGoogle Scholar
2Cardinale, G. F. and Robinson, C. J., J. Mater. Res. 7, 14321437 (1992).CrossRefGoogle Scholar
3Hertzberg, R. W., Deformation and Fracture Mechanics of Engineering Materials, 3rd ed. (John Wiley and Sons, New York, 1989), p. 257.Google Scholar
4Roark, R. J. and Young, W. C., Formulas for Stress and Strain, 6th ed. (McGraw-Hill, New York, 1989), p. 432.Google Scholar
5Field, J. E., Inst. Phys. Conf. Ser. No. 75: Chapter 3. Paper presented at 2nd Int. Conf. Science Hard Mater., Rhodes (1986).Google Scholar
6Anstis, G. R., Chantikul, P., Lawn, B. R., and Marshall, D. B., J. Am. Ceram. Soc. 64 (9), 533538 (1981).CrossRefGoogle Scholar
7Knight, D. S. and White, W. B., J. Mater. Res. 4, 385393 (1989).CrossRefGoogle Scholar
8Buckley, R. G., Moustakas, T. D., Ye, L., and Varon, J., J. Appl. Phys. 66 (8), 35953599 (1989).CrossRefGoogle Scholar
9Yarbrough, W. A. and Messier, R., Science 247 (Feb. 9), 688696 (1990).CrossRefGoogle Scholar
10Solin, S. A. and Ramdas, A. K., Phys. Rev. B 1, 16871698 (1970).CrossRefGoogle Scholar
11Harshavardhan, K. S., Vijayaraghaven, M. N., Chandrabhas, N., and Sood, A. K., J. Appl. Phys. 68 (7), 33033306 (1990).CrossRefGoogle Scholar
12Shetty, D. K., Rosenfeld, A. R., McGuire, P., Bansal, G. K., and Duckworth, W. H., Ceram. Bull. 59, 11931197 (1980).Google Scholar
13Westergaard, H. M., Public Roads, U.S. Dept. of Agriculture, Bureau of Public Roads (1926), Vol. 7, No. 2.Google Scholar
14Rice, R. W., Freiman, S. W., and Mecholsky, J. J. Jr., J. Am. Ceram. Soc. 63, 129136 (1980).CrossRefGoogle Scholar