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Formation of multilayer films for gas sensing by in situ thermophoretic deposition of nanoparticles from aerosol phase

Published online by Cambridge University Press:  03 March 2011

Thorsten Sahm ,
Weizhi Rong ,
Nicolae Bârsan ,
Lutz Mädler ,
Sheldon K. Friedlander  and
Udo Weimar
Thorsten Sahm*
Affiliation:
Institute of Physical Chemistry, University of Tuebingen, Tuebingen 72076, Germany
Weizhi Rong
Affiliation:
Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095-1592
Nicolae Bârsan
Affiliation:
Institute of Physical Chemistry, University of Tuebingen, Tuebingen 72076, Germany
Lutz Mädler
Affiliation:
Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095-1592
Sheldon K. Friedlander
Affiliation:
Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095-1592
Udo Weimar
Affiliation:
Institute of Physical Chemistry, University of Tuebingen, Tuebingen 72076, Germany
*
a) Address all correspondence to this author. e-mail: [email protected] This paper was selected as the Outstanding Meeting Paper for the 2006 MRS Spring Meeting Symposium R Proceedings, Vol. 915.
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Abstract

Dry aerosol synthesis applying the flame spray pyrolysis was used to manufacture and directly (in situ) deposit tin dioxide nanoparticles on sensor substrates. For the first time this technique was used to synthesize a combination of two porous layers for gas-sensor fabrication. Two different sensing layers were deposited on ceramic substrates, i.e., pure tin dioxide and palladium-doped tin dioxide. The top layer was a palladium-doped alumina as a filter. The fabricated sensors were tested with methane, CO, and ethanol. In the case of CH4, the pure tin dioxide sensor with the Pd/Al2O3 filter showed higher sensor signals and improved selectivity with respect to water vapor compared to single tin dioxide films. At temperatures up to 250 °C the Pd doping of the tin dioxide strongly increased the sensitivity to all gases. At higher temperatures the sensor signal significantly decreased for the Pd/SnO2 sensor with a Pd/Al2O3 filter, indicating high catalytic activity.

Keywords

Flame synthesisSensorSemiconducting
Type
Outstanding Meeting Papers:Review
Information
Journal of Materials Research , Volume 22 , Issue 4 , April 2007 , pp. 850 - 857
Copyright
Copyright © Materials Research Society 2007

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