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Evidence of transition metal diffusion during hydrothermal ceramic film growth: Ba(Ti,Zr)O3 on layered Ti–Zr alloy

Published online by Cambridge University Press:  31 January 2011

Alejandra V. Alvarez  and
V. M. Fuenzalida
Alejandra V. Alvarez
Affiliation:
Universidad de Chile, Facultad de Ciencias Físicas y Matemáticas, Depto. de Fisica Avenida Blanco Encalada 2008, Santiago-3, Chile
V. M. Fuenzalida*
Affiliation:
Universidad de Chile, Facultad de Ciencias Físicas y Matemáticas, Depto. de Fisica Avenida Blanco Encalada 2008, Santiago-3, Chile
*
a)Address all correspondence to this author.
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Abstract

Ti–Zr alloy thin films of 20–60 nm in thickness were evaporated on Pt-coated silicon wafers. The films exhibited a layered Ti–Zr depth distribution. The films were then treated hydrothermally in 0.25 M Ba(OH)2 at 150 and 200 °C for 4–8 h. Films treated at 150 °C did not exhibit reflections from the Ba(TixZr1−x)O3 perovskite structure by x-ray diffraction, although a slight barium content was detected by x-ray photoelectron spectrometry. On the other hand, the films treated hydrothermally at 200 °C revealed reflections corresponding to perovskite Ba(TixZr1−x)O3. These films exhibited a homogeneous titanium and zirconium depth distribution, as shown by x-ray photoelectron spectroscopy and Auger depth profiles, proving that either titanium or zirconium ions diffuse during the hydrothemal treatment. The initial Ti–Zr film was completely consumed during the hydrothermal process, leading to a film of homogeneous composition (Ba, Ti, and Zr) up to the interface with the platinum layer.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 14 , Issue 11 , November 1999 , pp. 4136 - 4139
Copyright
Copyright © Materials Research Society 1999

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