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Epitaxial growth of sol-gel PLZT thin films

Published online by Cambridge University Press:  03 March 2011

Dae Sung Yoon ,
Chang Jung Kim ,
Joon Sung Lee ,
Won Jong Lee  and
Kwangsoo No
Dae Sung Yoon
Affiliation:
Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology, Kusong Dong 373-1, Yusung Gu, Taejon, Korea
Chang Jung Kim
Affiliation:
Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology, Kusong Dong 373-1, Yusung Gu, Taejon, Korea
Joon Sung Lee
Affiliation:
Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology, Kusong Dong 373-1, Yusung Gu, Taejon, Korea
Won Jong Lee
Affiliation:
Department of Electronic Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Kusong Dong 373-1, Yusung Gu, Taejon, Korea
Kwangsoo No
Affiliation:
Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology, Kusong Dong 373-1, Yusung Gu, Taejon, Korea
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Abstract

Epitaxial lead lanthanum zirconate titanate [PLZT(9/50/50)] thin films were fabricated on various single crystal substrates using the spin coating of metallo-organic solutions. The films were heat-treated at 700 °C for 1 h using the direct insertion method. The films were epitaxially grown with (100), (100), and (110) being parallel to the SrTiO3(100), the MgO(100), and the sapphire (0112) substrates, respectively. The epitaxy of the films was investigated using x-ray diffraction, pole figures, rocking curves, and scanning electron microscopy.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 2 , February 1994 , pp. 420 - 425
Copyright
Copyright © Materials Research Society 1994

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