Hostname: page-component-586b7cd67f-t7fkt Total loading time: 0 Render date: 2024-11-26T20:48:08.585Z Has data issue: false hasContentIssue false

Electrooptic properties of highly oriented Pb(Zr,Ti)O3 film grown on glass substrate using lanthanum nitrate as a buffer layer

Published online by Cambridge University Press:  01 November 2004

Jong-Jin Choi
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
Gun-Tae Park
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
Hyoun-Ee Kim*
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
*
a)Address all correspondence to this author. e-mail: [email protected]
Get access

Abstract

Materials with preferred orientation exhibit unique properties that are frequently improved in comparison with those that are randomly oriented. Optical waveguide devices require high-quality single-crystal–like thin films because of their low optical propagation loss and their near–single-crystal properties. The growth mechanisms of textured films on non-lattice matched amorphous substrates, such as glass, are different from those on single-crystal substrates or the surface of a metal electrode. In this study, highly (100) oriented Pb(Zr,Ti)O3 PZT films were grown on an amorphous substrate by means of the sol-gel multicoating method, using lanthanum nitrate as a buffer layer. The lanthanum nitrate buffer layer was also very effective as a diffusion barrier against Pb-Si interdiffusion. The electrooptic properties of the PZT films were markedly enhanced when their orientation was adjusted to the (100) direction.

Type
Rapid Communications
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Haertling, G.H.: PLZT electrooptic materials and applications—a review. Ferroelectrics 75, 25 (1987).CrossRefGoogle Scholar
2Lijima, K., Tomita, Y., Takayama, R., Ueda, I.: Preparation of c-axis oriented PbTiO3 thin films and their crystallographic, dielectric, and pyroelectric properties. J. Appl. Phys. 60, 361 (1986).Google Scholar
3Nashimoto, K., Nakamura, S., Moriyama, H.: Metal alkoxide solution-derived epitaxial lead titanate-based thin-film optical waveguides. Jpn. J. Appl. Phys. 34 (Part 1), 5091 (1995).CrossRefGoogle Scholar
4Li, A.D., Shao, Q.Y., Wang, Y.J., Mak, C.L., Wong, K.H., Wu, D., Ming, N.: Epitaxial growth of (Pb,Zr)TiO3 films on LaAlO3 by sol-gel method using inorganic zirconium source. Mat. Res. Bull. 36, 2667 (2001).CrossRefGoogle Scholar
5Adachi, H., Mitsuyu, T., Yamazaki, O., Wasa, K.: Ferroelectric (Pb,La)(Zr,Ti)O3 epitaxial thin films on sapphire grown by rf-magnetron sputtering. J. Appl. Phy. 60, 736 (1986).CrossRefGoogle Scholar
6Seifert, A., Lange, F.F., Speck, J.S.: Epitaxial growth of PbTiO3 thin films on (001) SrTiO3 from solution precursors. J. Mater. Res. 10, 681 (1995).CrossRefGoogle Scholar
7Muralt, P., Maeder, T., Sagalowicz, L., Hiboux, S., Scalese, S., Naumovic, D., Agostino, R.G., Xanthopoulos, N., Mathieu, H.J., Patthey, L., Bullock, E.L.: Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding. J. Appl. Phys. 83, 3835 (1998).CrossRefGoogle Scholar
8Givarginov, E.I.: Oriented Crystallization on Amorphous Substrates (Plenum Press, New York, 1991).CrossRefGoogle Scholar
9Kwok, C.K., Desu, S.B.: Low temperature perovskite formation of lead zirconate titanate thin films by a seeding process. J. Mater. Res. 8, 339 (1993).CrossRefGoogle Scholar
10Preston, K.D., Haertling, G.H.: Comparison of electro-optic lead-lanthanum zirconate titanate films on crystalline and glass substrate. Appl. Phys. Lett. 60, 2831 (1992).CrossRefGoogle Scholar
11Lee, J.S., Kim, C.J., Yoon, D.S., Choi, C.G., Kim, J.M., No, K.: Effects of seeding layer on perovskite transformation, microstructure and transmittance of sol-gel-processed lanthanum-modified lead zirconate titanate films. Jpn. J. Appl. Phys. 33, Part I, 260 (1994).CrossRefGoogle Scholar
12Lee, J.S., Kim, C.J., Yoon, D.S., Choi, C.G., No, K.: Effects of seeding layer on orientation and phase formation of sol-gel-derived lanthanum-modified lead zirconate titanate films on glass. Jpn. J. Appl. Phys. 34, Part 1, 1947 (1995).CrossRefGoogle Scholar
13Schwartz, J.M., Francis, L.F., Schmidt, L.D.: Microstructural evolution of sol-gel derived lead titanate deposited on silica, in Ferroelectric Thin Films III, edited by Myers, E.R., Tuttle, B.A., Desu, S.B., and Larsen, P.K. (Mater. Res. Soc. Symp. Proc. 310, Pittsburgh, PA, 1993) p. 281.Google Scholar
14III, D.P. Birnie, Jilavi, M.H., Krajewski, T., Naβ, R.: The effect of barrier layer composition and structure on the crystallization of PZT coating on silicon. J. Sol-Gel Sci. Technol. 13, 855 (1998).Google Scholar
15Lin, Y., Zhao, B.R., Peng, H.B., Xu, B., Chen, H., Wu, F., Tao, H.J., Zhao, Z.X., Chen, J.S.: Growth and polarization features of highly (100) oriented Pb(Zr0.53Ti0.47)O3 films on Si with ultrathin SiO2 buffer layer. Appl. Phys. Lett. 73, 2781 (1998).CrossRefGoogle Scholar
16Kaminov, I.P.: An Introduction to Electrooptic Devices (Academic, New York, 1974), p. 31.Google Scholar
17Choi, J.J., Kim, D.Y., Park, G.Y., Kim, H.E.: Effect of electrode configuration on phase retardation of PLZT films grown on glass substrate. J. Am. Ceram. Soc. 87, 950 (2004).CrossRefGoogle Scholar
18Mekhemer, G.A.H., Balboul, B.A.A.: Thermal genesis course and characterization of lanthanum oxide. Colloids Surf., A: Physicochemical and Engineering Aspects 181, 19 (2001).CrossRefGoogle Scholar
19Choi, J.J., Park, C.S., Park, G.T., Kim, H.E.: Growth of highly (100) oriented Pb(Zr,Ti)O3 thin film on silicon and glass substrates using lanthanum nitrate as a buffer layer. Appl. Phy. Lett. (in print).Google Scholar
20Yi, G., Wu, Z. and Sayer, M.: Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro-optic properties. J. Appl. Phys. 64, 2717 (1988).CrossRefGoogle Scholar
21Potter, B.G.Jr., Sinclair, M.B., Dimos, D., Tuttle, B.A. and Schwartz, R.W.: Electro-optical and optical evaluation of Pb(Zr,Ti)O3 thin films using waveguide refractometry. J. Non-Cryst. Solids 178, 69 (1994).CrossRefGoogle Scholar
22Haertling, G.H. In Proceedings of the Fourth International Symposium on Integrated Ferroelectrics edited by Panholzer, R., International Symposium on Intergrated Ferroelectrics, ISIF: Martery, CA, 1992; p. 426.Google Scholar