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Electrical properties of highly oriented Pb(Mg1/3Nb2/3)O3–Pb(Zr,Ti)O3 thin films fabricated by the sol-gel method

Published online by Cambridge University Press:  01 June 2006

Joon-Koo Kang ,
Chee-Sung Park ,
Jae-Wung Lee ,
Gun-Tae Park ,
Hyoun-Ee Kim  and
Jong-Jin Choi
Joon-Koo Kang
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
Chee-Sung Park
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
Jae-Wung Lee
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
Gun-Tae Park
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
Hyoun-Ee Kim*
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
Jong-Jin Choi
Affiliation:
Department of Future Technology, Korea Institute of Machinery and Materials, Chang-Won, Gyeong-Nam 641-831, Korea
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

Highly (100)- and (111)-oriented lead magnesium niobate–lead zirconate titanate (PMN-PZT) films were deposited on Pt(111)/Ti/SiO2/Si substrates using a sol containing polyvinylpyrrolidone (PVP). The molar ratio of Zr/Ti in the PZT was fixed at 60/40, and the PMN content was changed in the range of 0–30 mol%. The films had a dense and columnar microstructure with a thickness of about 1 μm as a result of being spun four times. The crystallographic orientation of the films was controlled by adjusting the pyrolysis temperature; a (100) orientation was obtained by pyrolyzing at 300 °C and a (111) orientation by pyrolyzing at 350 °C. The electrical properties of the films were strongly dependent on the crystallographic orientation and PMN content. With increasing PMN content, the dielectric constant of all of the films increased. On the other hand, the remnant polarization of the (111)-oriented films decreased steadily with increasing PMN content, while that of the (100)-oriented films remained unchanged up to a PMN content of 20%. The piezoelectric coefficients of the (100)-oriented film were consistently higher than those of the (111)-oriented film with the same composition. The highest piezoelectric coefficient was observed for the (100)-oriented film with a composition of 0.2PMN–0.8PZT, indicating the morphotropic phase boundary between the rhombohedral PZT phase and the pseudocubic PMN phase is in the vicinity of this composition.

Keywords

FilmPiezoelectricSol-gel
Type
Articles
Information
Journal of Materials Research , Volume 21 , Issue 6 , June 2006 , pp. 1532 - 1536
Copyright
Copyright © Materials Research Society 2006

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