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Effect of presynthesis of Ta precursor on the formation of Ta nitrides

Published online by Cambridge University Press:  31 January 2011

Jong-Chul Park ,
Jae-Hwan Pee  and
Hyung-Ho Park
Jong-Chul Park
Affiliation:
Ceramicware Technology Center, Korea Institute of Ceramic Engineering and Technology, Icheon, Korea; and Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea
Jae-Hwan Pee
Affiliation:
Ceramicware Technology Center, Korea Institute of Ceramic Engineering and Technology, Icheon, Korea
Hyung-Ho Park*
Affiliation:
Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

We synthesized Ta3N5 by ammonolysis of Ta(OH)5. Ta(OH)5 was prepared by titration using TaCl5. The stirring speed and the amount of NH4OH to be added were important factors for controlling the particle size and formation of Ta(OH)5 during titration. During transformation of Ta(OH)5 to Ta3N5, the color changed from white to red. A small particle size and high level of formation of Ta(OH)5 improved nitridation, which was related to the color value. An x-ray diffractometer was used for phase identification. A scanning electron microscope was used to determine the microstructure, particle shape, and size. A colorimeter was used to obtain CIELab values. Ultraviolet–visible (UV–VIS) spectroscopy was carried out to determine the absorbance of colored powders. Thermogravimetry and a differential scanning calorimeter were used in air with a heating rate of 5 °C/min for thermal stability and behavior. An ON detector was used for detecting oxygen and nitrogen contents in Ta3N5.

Keywords

NitrideOptical propertiesPowder processing
Type
Articles
Information
Journal of Materials Research , Volume 25 , Issue 5 , May 2010 , pp. 835 - 841
Copyright
Copyright © Materials Research Society 2010

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References

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