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Effect of oxygen partial pressure on texture development in lead zirconate titanate thin films processed from metalorganic precursors

Published online by Cambridge University Press:  31 January 2011

Jarrod L. Norton ,
Gerald L. Liedl  and
Elliott B. Slamovich
Jarrod L. Norton
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907–1289
Gerald L. Liedl
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907–1289
Elliott B. Slamovich
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907–1289
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Abstract

Metalorganic liquid precursors were used to examine the effects of processing atmosphere on texture development in oriented Pb(Zr0.60Ti0.40)O3 thin films. After removal of organic ligands via pyrolysis, the films were heated at 25 °C/min in a 5% H2/Ar atmosphere until a switching temperature, after which the atmosphere was switched to pure oxygen. The films were heated to a maximum temperature of 650 °C with switching temperatures ranging from 450 to 600 °C. The degree of (111) orientation in the lead zirconate titanate (PZT) films increased with increasing switching temperature, resulting in highly textured (111) PZT films. These results suggest that atmosphere control plays a significant role in texture development during rapid thermal processing.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 12 , December 1999 , pp. 4615 - 4620
Copyright
Copyright © Materials Research Society 1999

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References

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