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Effect of N2 flow on the structure and mechanical properties of (CrTaTiVZr)Nx coatings processed by reactive magnetron sputtering

Published online by Cambridge University Press:  16 April 2015

Zue-Chin Chang ,
Du-Cheng Tsai  and
Erh-Chiang Chen
Zue-Chin Chang*
Affiliation:
Department of Mechanical Engineering, National Chin-Yi University of Technology, Taichung 411, Republic of China
Du-Cheng Tsai
Affiliation:
Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Republic of China
Erh-Chiang Chen
Affiliation:
Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Republic of China
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

(CrTaTiVZr)Nx coatings were deposited via reactive radio frequency magnetron sputtering. The effects of N2 flow at 0–8 SCCM on the chemical composition, microstructure, and mechanical properties of the films were investigated. The coatings deposited at a N2 flow of ≤2 SCCM showed a featureless structure with an amorphous phase. When the N2 flow was at 4 SCCM, two distinct layers were observed, namely, the bottom layer (close to the substrate) with an amorphous structure and the top layer with a fibrous structure and face-centered cubic phase. When the N2 flow was further increased, the structure was converted from fibers to columns with larger grains. Accordingly, the maximum hardness value of 36.4 GPa was achieved at a N2 flow of 4 SCCM, thereby indicating that (CrTaTiVZr)Nx coatings may be suitable as hard protective coatings.

Type
Articles
Information
Journal of Materials Research , Volume 30 , Issue 7 , 14 April 2015 , pp. 924 - 934
Copyright
Copyright © Materials Research Society 2015 

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