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Direct correlation of microtwin distribution with growth face morphology of CVD diamond films by a novel TEM technique

Published online by Cambridge University Press:  03 March 2011

Z.L. Wang ,
J. Bentley ,
R.E. Clausing ,
L. Heatherly  and
L.L. Horton
Z.L. Wang*
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6376, and Department of Materials Science and Engineering, The University of Tennessee, Knoxville, Tennessee 37996
J. Bentley
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6376
R.E. Clausing
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6376
L. Heatherly
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6376
L.L. Horton
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6376
*
a)Send all correspondence to this author at current address, Metallurgy Division, NIST, Building 223, Room B106, Gaithersburg, Maryland 20899.
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Abstract

A thick as-grown diamond film was examined directly by conventional transmission electron microscopy (TEM) without thinning, and the important microstructures near the growth surface were characterized. Specimen preparation for TEM involved simply fracturing the film; some of the diamond grains located on the specimen edge were thin enough to be directly examined by TEM. The 3-D topography of the diamond grains located at the intersection of the growth and the fracture surfaces was obtained using secondary electron images, so that the 2-D projected grain geometry could be derived easily to help interpret the TEM images. A diamond film grown with a 〈001〉 texture and having grains 2–3 μm diameter with {001} facets parallel to the substrate and four inclined {111} facets was examined. Grains with fracture surfaces that intersected the top (001) facet, grains with fractures that intersected only {111} facets, and unfractured grains were studied. It was found that the core volume bounded by the (001) top facet and its projected column defined by orthogonal internal {110} were free from microtwins, but contained a few dislocations. The remaining volume around this core, bounded by {111} facets (or grain boundaries) and the internal {110}, was filled with microtwins. The microtwins were not merely at the {111} surfaces. Our results reveal a growth mechanism in which microtwins are formed as material is added to {111} but not {001}. The formation of microtwins in CVD diamond is thus clearly associated with growth on {111} surface facets.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 6 , June 1994 , pp. 1552 - 1561
Copyright
Copyright © Materials Research Society 1994

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