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Determination of the thickness of titanium films on glass substrate by nanoindentation tests

Published online by Cambridge University Press:  11 February 2011

Tao Wen ,
Jianghong Gong ,
Zhijian Peng ,
Danyu Jiang ,
Chengbiao Wang ,
Zhiqiang Fu  and
Hezhuo Miao
Tao Wen
Affiliation:
School of Engineering and Technology, China University of Geosciences at Beijing, Beijing 100084, People’s Republic of China; and State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, People’s Republic of China
Jianghong Gong
Affiliation:
State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, People’s Republic of China
Zhijian Peng*
Affiliation:
School of Engineering and Technology, China University of Geosciences at Beijing, Beijing 100084, People’s Republic of China
Danyu Jiang
Affiliation:
Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, People’s Republic of China
Chengbiao Wang
Affiliation:
School of Engineering and Technology, China University of Geosciences at Beijing, Beijing 100084, People’s Republic of China
Zhiqiang Fu
Affiliation:
School of Engineering and Technology, China University of Geosciences at Beijing, Beijing 100084, People’s Republic of China
Hezhuo Miao*
Affiliation:
State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, People’s Republic of China
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

We reported a simple and convenient method to determine the film thickness by nanoindentation tests. This method starts from the analysis of the unloading portion of the measured nanoindentation load-displacement curves according to a quadratic polynomial, P = α(h − hf)2 − P0, where P is the indentation load, P0 is the virtual load used to consider the effect of the residual contact stress, h is the indenter displacement (penetration depth), hf is the final displacement after complete unloading which should be determined by curve fitting, and α is a constant. Then the best-fit value of the parameter P0 is plotted as a function of the maximum penetration depth, hmax. Such a P0 versus hmax curve may pass through a minimum, and hmax corresponding to this minimum would be equal to the film thickness value.

Keywords

NanoindentationThin Film
Type
Materials Communications
Information
Journal of Materials Research , Volume 26 , Issue 3 , 14 February 2011 , pp. 353 - 356
Copyright
Copyright © Materials Research Society 2011

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References

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