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The depth distribution of residual stresses in (Ti,Al)N films: Measurement and analysis

Published online by Cambridge University Press:  31 January 2011

Sheng-Sheng Zhao ,
Hao Du ,
Wei-Gang Hua ,
Jun Gong ,
Jia-Bao Li  and
Chao Sun
Sheng-Sheng Zhao
Affiliation:
Division of Surface Engineering of Materials, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
Hao Du
Affiliation:
Division of Surface Engineering of Materials, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
Wei-Gang Hua
Affiliation:
Division of Surface Engineering of Materials, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
Jun Gong
Affiliation:
Division of Surface Engineering of Materials, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
Jia-Bao Li
Affiliation:
Division of Surface Engineering of Materials, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
Chao Sun*
Affiliation:
Division of Surface Engineering of Materials, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

A method is introduced to determine the depth distribution of the residual stresses in (Ti,Al)N films. The films were gradually stripped by chemical corrosion, an optical system was designed to test the curvature change of the specimens, and the depth distribution of the residual stresses was calculated. The results show that the residual stresses increase gradually from the interface of film/substrate and reach a maximum value at the middle region, then decrease until the surface.

Keywords

CoatingIon platingStress/strain relationship
Type
Rapid Communications
Information
Journal of Materials Research , Volume 22 , Issue 10 , October 2007 , pp. 2659 - 2662
Copyright
Copyright © Materials Research Society 2007

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References

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