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The dependence of structural and mechanical properties on film thickness in sol-gel zirconia films

Published online by Cambridge University Press:  31 January 2011

Melissa J. Paterson ,
Peter J. K. Paterson  and
Besim Ben-Nissan
Melissa J. Paterson
Affiliation:
School of Mathematics, Physics, Computing and Electronics, Macquarie University, Sydney, New South Wales 2109, Australia
Peter J. K. Paterson
Affiliation:
Department of Applied Physics, Royal Melbourne Institute of Technology, GPO Box 2476V, Melbourne, Victoria 3001, Australia
Besim Ben-Nissan
Affiliation:
Department of Materials Science, University of Technology, Sydney, P.O. Box 123, Broadway, New South Wales 2007, Australia
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The structure, morphology, and mechanical properties of sol-gel zirconia films have been examined using XRD, AES depth profiling, AFM, and ultramicro indentation. There is a systematic variation in the structure and morphology of the zirconia films with increasing thickness. These changes include increases in the amount of monoclinic phase, substrate oxides, and a decrease in grain size. Ultramicro indentation measurements indicate measured hardness increases with film thickness. The highest hardness value was 6.12 GPa for a 900 nm thick film. However, these values may be influenced by the substrate oxide layer at the film/substrate interface which increases with film thickness. The modulus of the films appears to be thickness independent. As the films are made up of a number of separately fired layers, it appears that the property changes observed are also related to the number of thermal cycles experienced by the sample.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 2 , February 1998 , pp. 388 - 395
Copyright
Copyright © Materials Research Society 1998

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References

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